Ignition Finger Mechanism for Arc Evaporator Multi-Target Reliability
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Solution Overview
Problem
Existing ignition devices for arc evaporators in vacuum coating systems require complex drive designs to handle multiple targets and often result in the ignition contact being coated during the process, reducing reliability and lifespan, especially when dealing with isolating or oxide layers.
Innovation Solution
A mechanical contact ignition device with a movable trigger finger that follows a forced path to ensure contact with multiple targets without a complex drive, allowing the fingertip to be moved to a park position outside the target area after ignition, preventing coating and enhancing reliability and lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a mechanical contact ignition device is used for multiple targets, then the ignition contact can be reused, but the contact becomes coated during the coating process, reducing reliability and lifespan
Solution Approach 1:
The trigger finger is extracted from the coating area by moving it to a park position after ignition. The forced path mechanism ensures the finger automatically returns to a safe position outside the target area, separating the ignition function from the coating process to prevent contamination.
Solution Approach 2:
The trigger finger is made dynamically movable between different positions (ignition position and park position) through a forced path mechanism. This dynamic positioning allows the same contact to serve multiple targets without remaining stationary in the coating area, preventing coating accumulation.
2Adaptability or versatility
If a complex drive design is used to handle multiple targets, then all targets can be ignited, but the device complexity increases
Solution Approach 1:
The forced path mechanism provides self-guided movement of the trigger finger. The mechanical constraints of the forced path automatically guide the finger through the correct sequence of positions for igniting multiple targets without requiring complex external control systems or multiple actuators.
Solution Approach 2:
The ignition process for multiple targets is segmented into discrete positions along the forced path. Each target corresponds to a specific position or segment of the path, allowing systematic coverage of multiple targets through a single linear motion rather than complex multi-axis movement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for reliable ignition of multiple targets without a complex drive design, maintaining the ignition contact's cleanliness and extending its lifespan by keeping it away from the coating area, particularly beneficial for processes involving isolating or oxide layers.
Implementation Method 1
By releasing the electric circuit by means for example of a further stroke movement, by which the fingertip is removed from the cathode, a spark is generated at the cathode surface. This is the initial plasma that is propagated by the extremely dynamic generator 3.
Implementation Method 2
Ignition of the arc discharge through an electric sparkover. This is achieved for example by means of a device according to FIG. 2. In this case, an electric sparkover generated by means of a high-voltage pulse from a pulse generator 13 generates an initial spark on the target 5.
Implementation Method 3
Through a high-voltage pulse (up to approx. 500V) overlaying the arc supply, a current is conducted over this resistance from the cathode to the anode and causes the conductive layer 19 to melt locally. The arc discharge is thus ignited.
Data Source
AI summary
The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.