Arc Source Cooling Membrane for Sputtering Cathode
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Solution Overview
Problem
Conventional arc source systems for sputtering processes face inefficiencies in cooling and material utilization due to rigid constructions and direct water contact, which can lead to excess water in the deposition chamber and reduced cathode material usage.
Innovation Solution
An arc source system with a detachable holder body and cooling body configuration, featuring a thermally conductive membrane between them, allowing for efficient cooling and secure fastening of the cathode using a threaded or bayonet mount arrangement, enabling effective thermal conduction and material utilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If direct contact cooling with water is used, then cooling efficiency is improved, but excess water enters the deposition chamber causing contamination
Solution Approach 1:
A membrane is introduced as an intermediary component between the cooling fluid and the cathode/target assembly. The membrane allows thermal energy to pass through for efficient cooling while physically blocking water from entering the deposition chamber and contaminating the thin films being formed.
Solution Approach 2:
The solution employs a thin film membrane structure that provides both thermal conductivity for cooling and selective permeability to prevent water vapor or liquid water from reaching the deposition chamber. This thin film acts as a barrier that maintains thermal contact while preventing contamination.
2Stability of the object's composition
If rigid body construction is used for cooling, then structural stability is improved, but cooling efficiency decreases
Solution Approach 1:
The cooling system is segmented into distinct functional components: a rigid structural body for stability, a membrane layer for efficient thermal contact, and a cooling fluid channel system. This segmentation allows each component to optimize its specific function while working together as an integrated system.
3Ease of operation
If inner threaded portion construction is used, then cathode attachment is simplified, but cathode material usage is reduced
Solution Approach 1:
The membrane serves as an intermediary attachment layer between the cathode and the holder body. This membrane-based attachment system replaces traditional threaded constructions that consume cathode material, allowing for simpler attachment while preserving more usable cathode material for the sputtering process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances cooling efficiency, allowing for more cathode material usage and preventing cooling fluid from entering the deposition chamber, thus improving the sputtering process by maintaining efficient thermal and electrical conductivity.
Implementation Method 1
The membrane allows for a more efficient thermal conduction from the cooling fluid, thus providing for a more efficient cooling of the cathode material
Data Source
AI summary
An arc source system, comprising a cooling body (12) and a holder body (3) adapted to be detachably fastened to said cooling body and for holding a cathode body (4), wherein the system comprises a membrane (2) which is arranged between the holder body and a lower portion (14) of said cooling body; and wherein said lower portion (14) of said cooling body is provided with at least one cooling fluid channel (11), and wherein said holder body (3) is provided with an inner fastening arrangement configured to be coupled with a corresponding outer fastening arrangement on a cathode body (4).