Array Substrate With Partially Oxidized Source Electrode
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Solution Overview
Problem
In the manufacturing process of liquid crystal display array substrates, the source and data lines are prone to corrosion due to direct contact with etching agents, which affects display quality.
Innovation Solution
An oxide film is formed on the surfaces of the source and data lines after annealing, protecting them from corrosion during the etching process for pixel electrode formation, and a connecting portion is used to ensure electrical connection through a via hole, maintaining display functionality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a one-time composition process is adopted to form source electrode, drain electrode and data line patterns, then manufacturing efficiency is improved, but the source electrode and data line are prone to corrosion by etching agent during subsequent etching processes
Solution Approach 1:
An oxide film is formed on the surfaces of the source electrode and data line before the etching process. This preliminary protective layer prevents direct contact between the etching agent and the metal patterns, thereby avoiding corrosion while maintaining the benefits of the one-time composition process
Solution Approach 2:
The oxide film acts as an intermediary layer between the etching agent and the source electrode/data line. It provides a protective barrier that allows the etching process to proceed without directly exposing the metal patterns to corrosive chemicals
2Ease of manufacture
If high temperature environment is used during insulating layer formation, then manufacturing process is simplified, but corrosion of source electrode and data line is accelerated
Solution Approach 1:
The oxide film is formed in advance before the high temperature insulating layer formation process. This pre-formed protective layer shields the source electrode and data line from accelerated corrosion that would otherwise occur during high temperature processing
Solution Approach 2:
The oxide film serves as a cushioning protective layer that anticipates and prevents the harmful effects of high temperature exposure. It absorbs or mitigates the corrosive impact before it can reach the metal patterns
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The oxide film effectively prevents corrosion of the source and data lines, ensuring the display quality and normal operation of the liquid crystal display panel.
Implementation Method 1
an oxide film which is formed on the surfaces of the source electrode, the drain electrode and the data line after annealing treatment is conducted on the source electrode, the drain electrode and the data line
Implementation Method 2
after annealing treatment is conducted on the source electrode, the drain electrode and the data line
Data Source
AI summary
The embodiments of the invention disclose an array substrate, a manufacturing method thereof and a display device. Due to the fact that the surfaces of a source electrode, a drain electrode and a data line which are arranged on the same layer are provided with an oxide film which is formed after annealing treatment is conducted on the source electrode, the drain electrode and the data line, in the process that the pattern of a pixel electrode is formed on the source electrode, the drain electrode and the data line by the adoption of a composition technology, the oxide film can protect the source electrode and the data line under the oxide film from being corroded by an etching agent when the pattern of the pixel electrode is formed by etching, and the display quality of a display panel will not be affected.