Array Substrate Photosensor Switch Element Integration
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Solution Overview
Problem
The existing array substrate manufacturing process is inefficient due to the need for separate mask processes for photosensors and switch elements, leading to increased production costs and time.
Innovation Solution
A method of manufacturing an array substrate where both the switch element and photosensor are formed using the same layer structure, allowing for simultaneous processing and reducing the number of mask steps, with the photosensor and switch element sharing a light sensing metal and passivation layers to sense external light intensity and adjust display brightness accordingly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If separate mask processes are used for photosensors and switch elements, then manufacturing precision can be maintained, but productivity decreases and production efficiency is reduced
Solution Approach 1:
The patent combines the photosensor and switch element into a single integrated structure where the light sensing metal layer serves dual purposes. The photosensor electrode and switch element electrode share the same metal layer and processing steps, merging two previously separate manufacturing processes into one unified process that maintains precision while improving productivity
Solution Approach 2:
The light sensing metal layer is designed to perform multiple functions simultaneously: it serves as both the photosensor electrode for light detection and the electrode for the switch element. This multi-functional design eliminates the need for separate mask processes while ensuring both components maintain their required manufacturing precision
2Reliability
If separate mask processes are used for photosensors and switch elements, then component quality can be ensured, but loss of time increases due to additional processing steps
Solution Approach 1:
The patent merges the formation of photosensors and switch elements into a single mask process step. By integrating the electrode patterns for both components into one unified mask design and processing operation, the patent eliminates the time loss associated with sequential separate processes while ensuring both components meet quality requirements
3Adaptability or versatility
If separate mask processes are used for photosensors and switch elements, then individual optimization is possible, but device complexity increases
Solution Approach 1:
The patent combines the mask processes for photosensors and switch elements into a single integrated mask design. This unified approach reduces the overall number of mask steps and simplifies the manufacturing process while still allowing for individual optimization of each component's performance characteristics through careful pattern design
Data Source
AI summary
This disclosure provides an array substrate and a method of manufacturing the same. The method includes: forming a switch element; etching on an extension of a gate insulation layer to obtain a second amorphous silicon layer, a second N-type amorphous silicon layer and a light sensing metal at the same time to form a photosensor; forming a light sensing layer and a passivation layer on a source metal, a drain metal, and the light sensing metal; and forming a first light sensing layer and a first passivation layer on the source metal and the drain metal, and forming a second light sensing layer and a second passivation layer on the light sensing metal by using a second mask.