Array Substrate Through Hole Design for Copper Electrode Oxidation
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Solution Overview
Problem
The oxidation of copper-based source and drain electrodes during the patterning of transparent conductive films in liquid crystal display (LCD) array substrates leads to conductivity issues, affecting the yield and performance of the array substrate.
Innovation Solution
The array substrate design includes a first and second through hole in the insulating layer to connect the source and drain electrodes with the active layer, allowing the pixel electrode to be formed first, thereby preventing exposure and oxidation of the electrodes, ensuring their conductivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If source and drain electrodes are formed before pixel electrode patterning, then electrode connectivity is established, but electrode oxidation occurs during transparent conductive film patterning
Solution Approach 1:
The pixel electrode is formed first through through-holes in the insulating layer before the source and drain electrodes are deposited. This preliminary formation of the pixel electrode structure prevents subsequent exposure and oxidation of the electrodes during transparent conductive film patterning, while still establishing proper electrode connectivity.
2Ease of manufacture
If transparent conductive film patterning is performed after electrode formation, then pixel electrode can be formed, but electrode exposure leads to oxidation
Solution Approach 1:
The pixel electrode is formed first through through-holes in the insulating layer before the source and drain electrodes are deposited. This preliminary formation of the pixel electrode structure prevents subsequent exposure and oxidation of the electrodes during transparent conductive film patterning, while still establishing proper electrode connectivity.
Data Source
AI summary
An array substrate, a manufacturing method thereof and a display device are disclosed. The array substrate comprises a plurality of pixel unit regions each including a thin-film transistor (TFTs) and a pixel electrode. A first insulating layer provided with a first through hole and a second through hole is formed between an active layer of the TFT and the pixel electrode. A source electrode of the TFT is connected with the active layer through the first through hole. A drain electrode of the TFT is lapped onto the pixel electrode and connected with the active layer through the second through hole. The array substrate can prevent the oxidization of metal such as copper in the process of patterning a transparent conductive film.