Asymmetric JFET Source Depth for Low On-Resistance

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Solution Overview

Problem

Current semiconductor power amplifiers, particularly those using GaAs technologies, are costly due to the need for dedicated substrates and processing steps, which are not compatible with silicon-based CMOS technologies, leading to increased manufacturing costs and complexity.

Innovation Solution

An asymmetric junction field effect transistor (JFET) is developed with an extended source region depth below shallow trench isolation, reducing on-resistance and increasing on-current without degrading drain voltage or significantly increasing the gate voltage required for turning the JFET off, achieved through ion implantation and specific doping concentrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If GaAs technology is used for high-end power amplifiers, then performance is improved, but manufacturing cost increases due to dedicated substrates and processing steps

Engineering Contradiction:
Improvepower amplifier performanceVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent enables power amplifier functionality to be integrated into standard silicon-based CMOS substrates, making the substrate universal for both digital logic and power amplification applications. This eliminates the need for dedicated GaAs substrates and allows shared processing infrastructure, thereby reducing manufacturing costs while maintaining performance.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention modifies standard CMOS device parameters (such as well depth, doping concentrations, and device geometry) to enable high-voltage power amplifier operation on silicon substrates. By changing these parameters, the patent achieves GaAs-like performance on cost-effective silicon platforms.

Inventive Principle:
Principle #35Parameter changes

2Power

If modified SiGe BiCMOS technology is used for middle-range power amplifiers, then power capabilities are improved, but manufacturing cost increases due to additional processing steps

Engineering Contradiction:
Improvepower amplifier capabilityVSAvoidprocessing steps
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The patent merges power amplifier device structures with standard CMOS fabrication processes by forming JFET devices within existing CMOS well structures. This integration combines the power handling capabilities of bipolar technologies with the manufacturing simplicity of CMOS, reducing device complexity and processing steps while maintaining power capabilities.

Inventive Principle:
Principle #5Merging (Combining)

3Adaptability or versatility

If standard CMOS technology is modified to enable power amplifiers, then compatibility is improved, but manufacturing cost increases due to new processing steps

Engineering Contradiction:
ImproveCMOS compatibilityVSAvoidmanufacturing cost
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent applies local modifications to specific regions of the CMOS substrate (such as forming deep n-wells and p-wells with specific doping profiles in designated areas) to enable power amplifier functionality. These localized changes allow CMOS compatibility to be maintained in non-critical areas while introducing necessary modifications only where power devices are required, thereby minimizing overall manufacturing cost impact.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The asymmetric JFET design enhances performance by reducing on-resistance and increasing on-current, thereby improving power amplification capabilities while maintaining high impedance ratios, thus addressing the cost and compatibility issues of existing technologies.

Implementation Method 1

By performing an ion implantation step that extends the thickness of the source region to a depth greater than the thickness of the drain region and extends below the shallow trench isolation

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentEP2389688B1Asymmetric junction field effect transistor and method of manufacturing the same
Publication Date: 2018.12.05 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • EP2389688B1 patent drawingFigure 1A
  • EP2389688B1 patent drawingFigure 1B
  • EP2389688B1 patent drawingFigure 2A

AI summary

A junction field effect transistor (JFET) in a semiconductor substrate includes a source region, a drain region, a channel region, an upper gate region, and a lower gate region. The lower gate region is electrically connected to the upper gate region. The upper and lower gate regions control the current flow through the channel region. By performing an ion implantation step that extends the thickness of the source region to a depth greater than the thickness of the drain region, an asymmetric JFET is formed. The extension of depth of the source region relative to the depth of the drain region reduces the length for minority charge carriers to travel through the channel region, reduces the on-resistance of the JFET, and increases the on-current of the JFET, thereby enhancing the overall performance of the JFET without decreasing the allowable Vds or dramatically increasing Voff / Vpinch.