Asymmetric Seismic Mass for Multi-Directional Acceleration Sensing
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Solution Overview
Problem
Existing micromechanical acceleration sensors require multiple sensors aligned differently to detect acceleration effects in multiple perpendicular directions, leading to increased complexity, cost, and energy consumption.
Innovation Solution
A single seismic mass with asymmetrical mass distribution allows for the detection of acceleration effects in three perpendicular directions through translational and rotational deflections, using multiple detection means to measure forces in the x, y, and z directions, enabling a compact and energy-efficient multi-channel acceleration sensor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple acceleration sensors are used to detect acceleration effects in multiple perpendicular directions, then measurement capability in multiple directions is improved, but device complexity and cost increase
Solution Approach 1:
The patent combines multiple acceleration measurement capabilities into a single sensor device that contains a seismic mass capable of detecting acceleration effects in three perpendicular directions simultaneously. The detection device integrates multiple detection means that can measure different deflection components of the same seismic mass, thereby reducing the total number of separate sensors needed while maintaining multi-directional measurement capability
Solution Approach 2:
The seismic mass serves multiple functions: it can be deflected in different directions and rotated about different axes, allowing a single mass to provide measurement information for acceleration effects in three perpendicular directions. The detection device is designed to universally detect various deflection modes of the seismic mass, making the system adaptable to multi-directional acceleration measurement without requiring separate specialized sensors for each direction
2Adaptability or versatility
If multiple acceleration sensors are used for multi-channel acceleration measurement, then measurement coverage is improved, but production costs and implementation outlay increase
Solution Approach 1:
The invention merges multiple acceleration sensing functions into a single integrated device. By using one seismic mass with multiple detection means that can measure different deflection components, the patent reduces the number of separate sensor units that need to be manufactured, assembled, and calibrated, thereby reducing production costs and implementation outlay while achieving multi-channel acceleration measurement capability
3Volume of moving object
If a single seismic mass is used to detect acceleration in multiple directions, then device compactness is improved, but measurement precision may be compromised
Solution Approach 1:
The detection device is segmented into multiple independent detection means, each capable of detecting specific deflection components of the seismic mass. This segmentation allows the system to extract multiple measurement signals from a single seismic mass, maintaining measurement precision for each acceleration component while keeping the overall device compact. Each detection means can be optimized for its specific measurement function
Solution Approach 2:
The patent utilizes rotational deflection of the seismic mass about different axes as an additional dimension of measurement. By detecting both translational deflection and rotational deflection components, the system extracts more measurement information from the same physical object, achieving multi-directional acceleration measurement in a compact form factor without compromising precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables a three-channel acceleration measurement with a single seismic mass, reducing production and implementation costs while maintaining precise detection capabilities, allowing for independent measurement of acceleration effects in all three spatial directions.
Implementation Method 1
an acceleration effect on the micromechanical component parallel to the first direction... generates a force acting on the seismic mass parallel to the first direction and causes a first deflection of the seismic mass, in the form of a translation of the seismic mass substantially parallel to the first direction
Implementation Method 2
the seismic mass has an asymmetrical mass distribution with respect to the first axis of rotation... so that in particular an acceleration effect parallel to the third direction... generates a torque acting on the seismic mass and thus causes the second deflection of the seismic mass essentially in the form of a rotation of the seismic mass about the first axis of rotation
Implementation Method 3
the first, second and/or third detection means comprise electrodes, in particular for the capacitive measurement of the first, second and/or third deflection
Data Source
Figure 1a~2b
Figure 3a~3c
AI summary
The invention relates to a micromechanical component having a substrate, a seismic mass, and first and second detecting means, wherein the substrate comprises a main extension plane and wherein the first detecting means are provided for detecting a substantially translative first deflection of the seismic mass along a first direction substantially parallel to the main extension plane and wherein further the second detecting means are provided for detecting a substantially rotative second deflection of the seismic mass about a first axis of rotation parallel to a second direction substantially perpendicular to the main extension plane. The seismic mass can be designed as an asymmetric rocker, whereby accelerations can be detected as rotations. The detecting can be done by means of capacitative sensors.