Atomic Beam Source Reducing Sputter Particle Emission
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Solution Overview
Problem
Existing atomic beam sources cannot completely prevent the emission of unnecessary particles, despite using difficult-to-sputter materials, leading to a desire for further reduction in particle emission.
Innovation Solution
The atomic beam source incorporates a tubular cathode with a rod-shaped first and second anode, where the shapes and positional relationships of the cathode and anodes are predetermined to minimize the emission of sputter particles generated by plasma collisions, thereby reducing deposition and scattering of these particles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If difficult-to-sputter materials are used for the cathode and anodes, then sputter particle emission is reduced, but it cannot be completely prevented
Solution Approach 1:
The atomic beam source is divided into multiple electrode segments (cathode, first anode, second anode) with specific spatial arrangements. This segmentation allows for controlled plasma generation zones that minimize sputter particle generation while maintaining beam output efficiency
Solution Approach 2:
The patent optimizes geometric parameters including the spacing between electrodes (L1, L2), the dimensions of the cathode (D1, L3), and the anodes (D2, L4) to control plasma characteristics and reduce sputter particle emission while preserving atomic beam performance
2Productivity
If the cathode and anode are placed close together to improve atomic beam efficiency, then sputter particle generation increases due to higher plasma density
Solution Approach 1:
By introducing a second anode separated from the first anode by distance L2, the plasma generation zone is segmented into distinct regions. This allows high plasma density near the emission port for efficient beam generation while creating a low-sputter region further away
Solution Approach 2:
The patent extends the electrode arrangement into multiple spatial dimensions with the cathode having length L3 and the anodes positioned at different distances (L1, L2) from the emission port, creating a three-dimensional plasma control structure that separates beam generation from sputter particle generation zones
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces the emission of unnecessary particles by suppressing the generation and deposition of sputter particles, maintaining atomic beam output efficiency while minimizing wear and particle fallout.
Implementation Method 1
plasma between the first anode and the second anode
Implementation Method 2
sputter particles resulting from collision of cations, which have been generated by plasma between the first anode and the second anode, with at least one selected from the cathode, the first anode, and the second anode
Data Source
AI summary
An atomic beam source includes a tubular cathode that includes an emission portion that includes an emission port through which an atomic beam can be emitted, a rod-shaped first anode disposed inside the cathode, and a rod-shaped second anode disposed inside the cathode and spaced from the first anode. At least one selected from the group consisting of a shape of the cathode, a shape of the first anode, a shape of the second anode, and a positional relationship between the cathode, the first anode, and the second anode is predetermined so that emission of sputter particles resulting from collision of cations, which have been generated by plasma between the first anode and the second anode, with at least one selected from the cathode, the first anode, and the second anode is reduced.