Atomic Force Microscope Tip Vibration for Deep Narrow Trench Measurement
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Solution Overview
Problem
Existing scanning probe microscopes face challenges in measuring narrow and deep trench structures due to tip damage and slow measurement speeds, particularly in pin point mode operations.
Innovation Solution
A method involving controlled vibration of the tip during approach, lift, and shift steps, allowing for faster measurement speeds and reduced tip wear, suitable for deep and narrow trench structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a long tip is used to measure deep and narrow trench structures, then the measurement capability is improved, but the tip control difficulty increases and tip wear increases
Solution Approach 1:
The patent applies mechanical vibration to the tip during the approach step, causing the tip to vibrate in the vertical direction. This vibration allows the tip to dynamically adapt to the trench structure, reducing control difficulty and wear while maintaining measurement capability for deep and narrow features
2Measurement precision
If pin point mode is used to measure deep and narrow trench structures, then the measurement capability is improved, but the measurement time increases excessively
Solution Approach 1:
The patent implements periodic vibration of the tip during the approach step, creating a rhythmic motion that enables faster approach speeds while maintaining measurement accuracy. This periodic action reduces the time required for each measurement cycle, thereby improving overall measurement speed and productivity
3Measurement precision
If the tip scans the surface following the surface profile, then the topography measurement is achieved, but tip collision with the surface is inevitable causing tip damage
Solution Approach 1:
The patent utilizes mechanical vibration of the tip during approach to create a dynamic interaction with the surface that reduces continuous contact and collision. The vibrating tip can sense surface features through intermittent contact, maintaining topography measurement capability while reducing tip wear and damage
Solution Approach 2:
The patent employs feedback control based on detected vibration characteristics to adjust the approach process. When the tip encounters the surface or trench structures, changes in vibration amplitude or frequency provide feedback that allows the system to adapt the approach speed and positioning, preventing excessive force and tip damage while maintaining accurate topography measurement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables faster and more precise measurement of deep and narrow trench structures with reduced tip wear, improving throughput and image quality.
Implementation Method 1
the tip is controlled to vibrate in a portion or the entirety of the approach step and the lift step
Data Source
AI summary
The present invention relates to a method for measuring, by a measurement device, characteristics of a surface of an object to be measured. The method includes an approach step of positioning the tip to come into contact with a specific position of the surface of the object to be measured and a lift step of separating the contacted tip from the surface of the object are repeatedly performed with respect to a plurality of positions of the surface of the object. The tip is controlled to vibrate in a portion or the entirety of the approach step and the lift step, and a movement characteristic of the tip is controlled according to a change of the vibration characteristic of the tip.