Automated Optical Inspection Tool for Diffuser Opening Structures
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Solution Overview
Problem
Manual inspection of diffusers in electronic device manufacturing is inefficient and prone to missing defects, especially in large diffusers with numerous opening structures, leading to non-uniform gas flow and suboptimal processing conditions.
Innovation Solution
An automated optical inspection tool with a video microscope unit, adaptive optics device, and CMOS camera that uses front and back illumination sources to capture series of images at varying focal depths, allowing for comprehensive and quantitative measurement of diffuser opening structures, mounted on an automated motion-controlled platform for precise alignment and defect analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual inspection methods are used for diffusers, then device complexity is reduced, but measurement precision and productivity deteriorate due to inefficiency and high error rates
Solution Approach 1:
The patent replaces manual mechanical inspection with an automated optical inspection system using a video microscope unit, adaptive optics device, and CMOS camera to detect defects in diffuser opening structures, eliminating human error and improving measurement precision
Solution Approach 2:
The patent creates optical copies (images) of the diffuser opening structures through the video microscope unit and adaptive optics device, allowing comprehensive inspection without direct physical contact, thereby improving measurement precision while maintaining system manageability
2Productivity
If manual inspection is used for large diffusers with numerous opening structures, then device complexity remains low, but productivity deteriorates due to inability to inspect 100% of features
Solution Approach 1:
The patent segments the inspection process by using the adaptive optics device to capture multiple images at different focal depths, allowing systematic inspection of each opening structure individually across the large diffuser, thereby achieving 100% coverage without overwhelming system complexity
Solution Approach 2:
The patent adds the dimension of focal depth through the adaptive optics device, enabling inspection at multiple z-positions simultaneously, which dramatically increases productivity by allowing 100% of opening structures to be inspected without requiring proportional increases in inspection time
3Measurement precision
If conventional optical inspection is used, then device complexity is low, but measurement precision deteriorates due to inability to resolve features at different focal depths
Solution Approach 1:
The patent employs the adaptive optics device with variable focus capability to dynamically adjust focal depth during inspection, allowing precise measurement of features at different z-positions within the opening structures, thereby achieving superior depth resolution
Solution Approach 2:
The patent changes the focal plane parameter through the adaptive optics device to inspect features at different depths, enabling high-precision measurement of opening structure dimensions and positions that would be impossible with fixed-focus optics
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables 100% inspection of diffuser features, identifying defects and variations that impact quality and performance, replacing manual processes with state-of-the-art optical inspection, and facilitating full inspection of large diffusers within hours.
Implementation Method 1
The adaptive optics device includes a cylindrical piezo component surrounding a chamber of liquid, and the cylindrical piezo component vibrates at a frequency to generate a gradient in a refractive index of the liquid
Implementation Method 2
the cylindrical piezo component vibrates at a frequency to generate a gradient in a refractive index of the liquid, the gradient to focus light passing through the liquid at a focal position based on the frequency
Implementation Method 3
a video microscope unit (VMU) comprising a fixed lens to magnify light reflected from the opening structure
Implementation Method 4
one or more illumination sources to illuminate an opening structure in the diffuser
Data Source
AI summary
An automated optical inspection tool for inspection of a diffuser includes one or more illumination sources to illuminate an opening structure in the diffuser, and a video microscope unit (VMU) comprising a fixed lens to magnify light reflected from the opening structure. The automated optical inspection tool further includes an optics device comprising a variable focus lens positioned to receive light magnified by the fixed lens, the optics device to focus at different focal depths by varying the variable focus lens, and a camera positioned to receive light as magnified by the fixed lens of the VMU and as focused by the different focal depths of the variable focus lens to capture a series of images of the opening structure in the diffuser.