Automatic Multi-Joint Robot Calibration with In-Chamber Sensors

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Solution Overview

Problem

Manual calibration of multi-link robots in semiconductor manufacturing systems is laborious, time-consuming, and exposes the sealed environment to contamination, leading to prolonged downtime and reduced line yield.

Innovation Solution

Implement a system with vertically and horizontally oriented sensors within the chamber to automatically calibrate robot links and end effectors, determining zero positions without opening the system, using a controller to perform calibration under vacuum or operating conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual calibration is performed by opening the transfer chamber to atmosphere, then personnel can access the interior to calibrate the robot, but the chamber is exposed to contamination and downtime is prolonged

Engineering Contradiction:

Improveaccessibility for calibrationVSAvoidcontamination of transfer chamber

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent replaces manual mechanical calibration operations with an automated optical sensing system. The vertically oriented sensor detects the position of robot links automatically, eliminating the need for personnel to physically access the chamber interior for calibration tasks.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The calibration system performs self-calibration of the robot by automatically detecting link positions using the vertically oriented sensor. The system determines zero horizontal positions and calibrates the robot without external human intervention, allowing calibration to occur while the chamber remains sealed.

Inventive Principle:

Principle #25Self-service

2Manufacturing precision

If manual calibration is performed by opening the transfer chamber, then robot calibration can be completed, but the process is time-consuming and laborious

Engineering Contradiction:

Improverobot calibration accuracyVSAvoiddowntime of transfer chamber

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent replaces time-consuming manual calibration operations with an automated optical sensing and computation system. The vertically oriented sensor rapidly captures link positions, and the controller automatically computes calibration parameters, dramatically reducing calibration time compared to manual procedures.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The calibration process can be performed continuously without interrupting the sealed state of the transfer chamber. The automated system allows calibration to proceed while the chamber remains closed, eliminating the downtime associated with opening and closing the chamber for manual calibration.

Inventive Principle:

Principle #20Continuity of useful action

3Reliability

If vertically oriented sensors are used for automatic calibration, then the chamber remains sealed and contamination is reduced, but the system complexity increases

Engineering Contradiction:

Improvesealed environment maintenanceVSAvoidsensor and controller system

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The vertically oriented sensor serves as an intermediary device that enables communication between the robot links and the controller without requiring physical access to the chamber interior. The sensor transmits positional information optically, allowing the controller to perform calibration calculations while the chamber remains sealed.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces complex manual calibration procedures with a streamlined automated system using vertically oriented sensors. Although the sensor system adds complexity, it eliminates the need for chamber opening mechanisms and manual intervention, ultimately simplifying the overall process by maintaining the chamber in a permanently sealed state.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS20250236020A1Automatic robot calibration for multi-joint robots

Publication Date: 2025.07.24 APPLIED MATERIALS INC

AI summary

A system includes a chamber, a robot within the chamber, the robot including a plurality of links. The system further includes a vertically oriented sensor within the chamber, the vertically oriented sensor to detect a presence of one or more of the plurality of links. The system further includes a controller, to perform for each link to cause the robot to move the link through a field of view of the vertically oriented sensor. The controller further determines a zero horizontal position for the link based on the position of the link at which the link was detected by the vertically oriented sensor. The controller further automatically calibrates the robot within the chamber based on the zero horizontal position determined for each of the plurality of links.