Autonomous Mobile Robots for Semiconductor Wafer Handling

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Solution Overview

Problem

Automated material handling systems in semiconductor fabrication facilities face limitations in adaptability and efficiency due to restricted movement ranges and reliance on manual handling, which can lead to human error and resource-intensive operations.

Innovation Solution

An automated wafer handling system utilizing networked and autonomous free-moving vehicles, including mobile robotic arms and autonomous carts, that can communicate and coordinate to move wafers between processing tools and reconfigure according to changing layouts, reducing the need for manual intervention and traditional rail-based systems.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If traditional rail-based automated material handling systems are used, then wafer transport is automated, but the system lacks adaptability when processing machines are moved or changed

Engineering Contradiction:

Improvesystem adaptabilityVSAvoidsystem complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The system transitions from fixed rail-based infrastructure to dynamic, mobile robotic vehicles that can autonomously navigate and adapt to changing facility layouts. The robotic vehicles include movable wheels and autonomous navigation capabilities, allowing the system to reconfigure itself when processing machines are relocated without requiring complex infrastructure modifications.

Inventive Principle:

Principle #15Dynamics

2Reliability

If manual wafer handling is used, then system flexibility is maintained, but human error and resource consumption increase

Engineering Contradiction:

Improveerror reductionVSAvoidautomation level

Core Design Contradiction:

ReliabilityVSExtent of automation

Solution Approach 1:

The robotic vehicles are equipped with autonomous navigation capabilities, onboard sensors, and integrated wafer handling mechanisms that enable them to independently transport wafers between processing machines without human intervention. The system self-manages path planning, machine communication, and wafer transfer operations, eliminating human error while maintaining high automation levels.

Inventive Principle:

Principle #25Self-service

3Adaptability or versatility

If overhead hoist transports with fixed paths are used, then wafer carriers can be transported between tools, but the system cannot easily accommodate layout changes

Engineering Contradiction:

Improvelayout reconfigurationVSAvoidreconfiguration time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system replaces fixed overhead hoist paths with mobile robotic vehicles that can dynamically adjust their routes and destinations. When layout changes occur, the robotic vehicles autonomously update their navigation paths and communication protocols, enabling rapid reconfiguration without the time-consuming infrastructure modifications required by fixed rail or hoist systems.

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS10910249B2Systems and methods for automated wafer handling

Publication Date: 2021.02.02 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

In an embodiment a system includes: a wafer store comprising a wafer configured for processing by a semiconductor processing tool; a cart configured to transport the wafer from the wafer store along a predetermined path; a robotic arm, the robotic arm configured to: read wafer data from the wafer store, transport the wafer from the wafer store to the cart, send the wafer data to the cart, wherein the cart is configured to transport the wafer to a location in response to the wafer data.