Auxiliary Clamping Structure for Substrate Carrier Swing Control
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Solution Overview
Problem
In large-size electrochemical deposition equipment, the substrate carrier in substrate transfer devices experiences significant swing due to inertia during high-speed operation, affecting reliability and productivity, and leading to premature aging of the gripping mechanism.
Innovation Solution
A substrate transfer device with a horizontally arranged cross beam and longitudinally arranged support beams, featuring an auxiliary clamping structure with telescopic cylinders and connection arms that control the clamping mechanism to minimize swing amplitude, ensuring stable operation and extended service life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate carrier operates at high speed (2000 mm/s) to meet capacity requirements, then productivity is improved, but the substrate carrier deflects and swings due to inertia during starting, stopping and travelling, worsening reliability
Solution Approach 1:
The clamping mechanism is divided into a main clamping structure and auxiliary clamping structures. The main clamping structure provides primary holding force, while the auxiliary clamping structures provide additional support and reduce swing amplitude. This segmentation allows the system to maintain high-speed operation while improving stability through distributed clamping points.
Solution Approach 2:
The auxiliary clamping structures are positioned to counteract the惯性 forces that cause substrate carrier deflection and swing during high-speed operation. By providing preliminary counter-clamping action, the system prevents excessive swing amplitude and maintains reliability during starting, stopping and travelling phases.
2Productivity
If the substrate carrier operates at high speed, then productivity is improved, but the gripping mechanism ages prematurely due to increased stress and swing, worsening durability
Solution Approach 1:
The gripping system is segmented into main and auxiliary clamping structures, distributing the mechanical stress across multiple components. This reduces the load on any single gripping element, thereby extending the overall service life of the gripping mechanism while maintaining high-speed productivity.
Solution Approach 2:
The auxiliary clamping structures act as a cushioning mechanism that reduces swing amplitude and protects the main gripping mechanism from excessive stress during high-speed operation. This beforehand protection prevents premature aging and extends the durability of the gripping mechanism.
3Productivity
If the substrate carrier swings excessively during high-speed operation, then productivity is maintained, but debris is generated and mechanism reliability deteriorates
Solution Approach 1:
The auxiliary clamping structures provide preliminary counter-action to prevent excessive substrate carrier swing that would otherwise generate debris. By maintaining tighter control over the substrate carrier position during high-speed operation, the system reduces mechanical wear and debris generation while preserving productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The auxiliary clamping structure effectively reduces swing amplitude to within 2 mm, enhancing the reliability and productivity of the substrate transfer device, reducing debris and extending the service life of the gripping mechanism while maintaining high-speed operation under heavy loads.
Implementation Method 1
a first telescopic cylinder arranged in parallel with the extension direction of the support beam, and a transmission rod connected to one end of the first telescopic cylinder via a first rotary shaft 51, the transmission rod being in transmission connection with one end of the connection arm via a second rotary shaft 52
Implementation Method 2
two clamping assemblies arranged opposite to each other, each of the clamping assemblies comprising at least one clamping connecting rod having, in an arrangement direction thereof, a head end connected to the second telescopic cylinder and a tail end as a free end
Implementation Method 3
the lower part of the substrate carrier will be deflected due to inertia, and the swing will affect the reliability of the mechanism
Data Source
AI summary
The present application relates to a substrate transfer device, comprising a horizontally arranged cross beam, and support beams longitudinally arranged at two ends of the cross beam, wherein a substrate carrier is suspended on the cross beam, the substrate carrier is located between the two support beams, and the substrate carrier is parallel to a plane where the two support beams are located, the substrate carrier comprises two side walls oppositely arranged in a horizontal direction, and each of the support beams is provided with an auxiliary clamping structure for clamping the substrate carrier during transferring of the substrate carrier.