Auxiliary Electrode Arc Ion Plating Heat Management
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Solution Overview
Problem
In film forming devices using the arc ion plating method, the Joule heat generated in closing members due to high electron flow causes thermal damage and instability in the discharge process, leading to deterioration of seal materials and inefficient film formation.
Innovation Solution
The introduction of an auxiliary electrode along the inner wall of the cylindrical evaporation source redirects electron flow, reducing Joule heat and stabilizing the arc discharge, while an internal cooling structure and gas passage help in maintaining a stable vacuum and cooling the auxiliary electrode, preventing thermal deformation and seal damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If closing members are used to close the internal space of the cylindrical evaporation source, then the vacuum seal is maintained, but Joule heat is generated in the closing members due to electron flow, causing thermal damage to seal materials
Solution Approach 1:
The patent extracts the electron collection function from the closing members by introducing a separate auxiliary electrode. The auxiliary electrode is positioned to receive electrons emitted during arc discharge, preventing electrons from flowing through the closing members and generating Joule heat. This separation allows the closing members to maintain their sealing function without thermal damage.
Solution Approach 2:
The auxiliary electrode acts as an intermediary component between the arc discharge zone and the closing members. It intercepts electrons in the vacuum space and provides a dedicated path for electron flow, preventing direct electron interaction with the closing members and their seal materials.
2Productivity
If high current is concentrated on the arc spot for efficient film formation, then film formation efficiency is improved, but Joule heat generation in closing members increases, leading to seal material deterioration
Solution Approach 1:
The patent separates the electron collection function from the closing members by introducing an auxiliary electrode. This allows high current to be concentrated on the arc spot for efficient film formation while the auxiliary electrode captures the resulting electron flow, preventing Joule heat generation in the closing members and protecting seal materials from thermal deterioration.
3Reliability
If the closing members are grounded to function as the anode, then the arc discharge can be maintained, but the closing members are Joule-heated to high temperature, affecting the stability of the discharge process
Solution Approach 1:
The patent extracts the electron collection function from the closing members by introducing a separate auxiliary electrode. The auxiliary electrode is grounded or applied with positive voltage to function as the anode, capturing electrons emitted during arc discharge. This prevents electrons from flowing through the closing members, eliminating Joule heat generation while maintaining arc discharge stability.
Solution Approach 2:
The auxiliary electrode serves as an intermediary that intercepts electrons between the cathode (evaporation source) and the closing members. By providing a dedicated electron collection path, it maintains the arc discharge process while preventing thermal damage to the closing members, ensuring discharge stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces Joule heat in closing members, enhances the stability of the arc discharge, and improves film formation efficiency by minimizing surface roughness and extending the lifespan of seal materials.
Implementation Method 1
The cylindrical evaporation source discharges ions from the evaporation source by arc discharge such that the ions are deposited on a surface of the workpiece
Implementation Method 2
The auxiliary electrode is configured to be grounded or to be applied with a positive voltage such that electrons of the internal space flow to the auxiliary electrode
Implementation Method 3
electrons generated in the container flow to the closing members to generate a current. Therefore, the closing members may be Joule-heated to a high temperature
Implementation Method 4
an internal cooling structure and gas passage help in maintaining a stable vacuum and cooling the auxiliary electrode
Data Source
AI summary
A film forming device includes a cylindrical evaporation source, closing members, and an auxiliary electrode. The cylindrical evaporation source is configured to accommodate a workpiece in an internal space of the cylindrical evaporation source. The cylindrical evaporation source is configured to discharge ions from the cylindrical evaporation source by arc discharge such that the ions are deposited on a surface of the workpiece. The closing members close the internal space. The auxiliary electrode is disposed along an inner wall surface of the cylindrical evaporation source. The auxiliary electrode is configured to be grounded or to be applied with a positive voltage such that electrons of the internal space flow to the auxiliary electrode.