Avalanche Diode Unit Cells for High-Speed Electron Beam Imaging

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Solution Overview

Problem

Existing electron beam detection elements face challenges in high-speed imaging due to limitations in signal processing and storage capabilities, as discussed in Japanese Patent Application Laid-Open No. 2013-20972 does not provide a detailed configuration for efficient high-speed imaging.

Innovation Solution

The electron beam detection element incorporates a plurality of unit cells, each equipped with a diode of avalanche multiplication type and multiple memories, arranged in a matrix form, allowing for simultaneous storage and output of signals from multiple frames without intervention during signal reading, utilizing vertical and horizontal scanning circuits, signal processing circuits, and output circuits to achieve high-speed imaging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If multiple frames are stored and processed sequentially, then imaging speed is limited, but signal processing accuracy can be maintained

Engineering Contradiction:
Improveimaging speedVSAvoidsignal reading time
Core Design Contradiction:
SpeedVSLoss of time

Solution Approach 1:

The detection element is divided into multiple independent unit cells, each capable of storing signals from different frames in separate memory regions. This segmentation allows parallel storage and processing of multiple frames without requiring sequential intervention, thereby increasing imaging speed while maintaining signal processing accuracy.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Signals from multiple frames are stored in advance in the memory units before reading occurs. This preliminary storage eliminates the need for real-time signal processing intervention during frame acquisition, enabling high-speed imaging by decoupling the storage and reading operations.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If intervention is required during signal reading, then signal processing accuracy is improved, but imaging speed decreases

Engineering Contradiction:
Improveimaging throughputVSAvoidsignal reading complexity
Core Design Contradiction:
ProductivityVSEase of operation

Solution Approach 1:

The detection element performs self-service by automatically storing signals from multiple frames in its internal memory units without requiring external intervention during the acquisition phase. The system only requires a single reading operation after all frames are captured, simplifying the operation while increasing productivity.

Inventive Principle:
Principle #25Self-service

3Device complexity

If a simple memory structure is used, then device complexity is reduced, but high-speed imaging capability is limited

Engineering Contradiction:
Improvememory structure complexityVSAvoidframe acquisition speed
Core Design Contradiction:
Device complexityVSSpeed

Solution Approach 1:

The patent introduces a temporal dimension to the memory structure by providing multiple memory units that can store signals from different frames simultaneously. This dimensional expansion allows the system to handle high-speed imaging by storing multiple frames in parallel rather than requiring complex sequential processing of a single memory structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables high-speed imaging of multiple frames by parallel processing and storage of signals, reducing power consumption and intervention during signal reading, while also allowing for efficient signal processing and output, thereby enhancing imaging capabilities.

Implementation Method 1

Each of the plurality of unit cells includes a diode of avalanche multiplication type and a plurality of memories. The diode is configured to receive an electron beam.

Methodology Applied
Scientific EffectAvalanche multiplication: Avalanche Breakdown

Data Source

PatentUS11164718B2Electron beam detection element, electron microscope, and transmission electron microscope
Publication Date: 2021.11.02 CANON KK
  • US11164718B2 patent drawing
  • US11164718B2 patent drawing
  • US11164718B2 patent drawing

AI summary

An electron beam detection element according to an exemplary embodiment includes a plurality of unit cells. Each of the plurality of unit cells includes a diode of avalanche multiplication type and a plurality of memories. The diode of avalanche multiplication type is configured to detect an electron beam. The plurality of memories store signals of different frames respectively, each of the signals being output from the diode.