Avalanche Photodiode With Segmented Regions

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current avalanche photodiodes face trade-offs between dark current and breakdown voltage, where reducing one parameter often increases the other, limiting their performance in applications such as long-range fiber-optic telecommunication and quantum sensing.

Innovation Solution

The design incorporates a variable width charge and multiplication region with a separate absorption region, allowing for independent adjustment of dark current and breakdown voltage through varying the pitch and dimensions of these regions, reducing avalanche noise and breakdown voltage without increasing dark current.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If separate absorption, charge and multiplication regions are used, then dark current is reduced, but breakdown voltage increases

Engineering Contradiction:
Improvedark currentVSAvoidbreakdown voltage
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The photodiode structure is divided into separate absorption, charge, and multiplication regions, each optimized for its specific function. The absorption region captures photons, the charge region collects carriers, and the multiplication region amplifies signals, allowing independent optimization of dark current and breakdown voltage characteristics

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each region is doped with specific concentrations and materials tailored to its local function. The absorption region uses one doping profile, the charge region uses another, and the multiplication region uses a third, allowing each zone to perform its function optimally without compromising the other parameters

Inventive Principle:
Principle #3Local quality

2Reliability

If multiplication region is placed inside the absorption region, then breakdown voltage is reduced, but dark current increases

Engineering Contradiction:
Improvebreakdown voltageVSAvoiddark current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The multiplication region is spatially separated from the absorption region and placed in a distinct zone with appropriate doping. This segmentation allows the multiplication function to be performed at a location that reduces breakdown voltage without causing dark current generation in the absorption region

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A charge region is introduced as an intermediary between the absorption region and the multiplication region. This charge region collects carriers from the absorption region and transports them to the multiplication region, preventing direct interaction that would cause dark current while maintaining low breakdown voltage

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables reduced breakdown voltage without increasing dark current, while also minimizing avalanche noise, thereby enhancing the performance of avalanche photodiodes in sensitive applications.

Implementation Method 1

An avalanche photodiode (APD) is a highly sensitive semiconductor photodiode that exploits the photoelectric effect to convert light into electricity

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

An avalanche photodiode (APD) is a highly sensitive semiconductor photodiode

Methodology Applied
Scientific EffectAvalanche breakdown: Avalanche Breakdown

Data Source

PatentUS11322636B2Photodiode
Publication Date: 2022.05.03 GLOBALFOUNDRIES US INC
  • US11322636B2 patent drawing
  • US11322636B2 patent drawing
  • US11322636B2 patent drawing

AI summary

The present disclosure relates to semiconductor structures and, more particularly, to photodiode structures and methods of manufacture. The structure includes: a charge region having a first doping concentration and a variable width; a multiplication region adjacent to the charge region; and an absorption region adjacent to the variable width charge region.