Azeotrope-like Mixtures for Semiconductor Cleaning
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Solution Overview
Problem
The semiconductor industry faces challenges in finding environmentally safe solvents for cleaning applications, as chlorofluorocarbons harm the ozone layer, and hydrofluorocarbons contribute to global warming, necessitating the development of new solvents for removing residual flux, lubricants, and contaminants without environmental impact.
Innovation Solution
Azeotropic and azeotrope-like compositions comprising 1,1,1,2,2,3,4,5,5-decafluoropentane, 1,1,2,2,3,3,4-heptafluorocyclopentane, and trans-1,2-dichloroethylene, with optional alcohol additives, which form constant boiling mixtures effective in dissolving oils and contaminants, replacing traditional CFC compounds.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If chlorofluorocarbon (CFC) compounds are used for cleaning semiconductor surfaces, then cleaning effectiveness is improved, but environmental harm to the ozone layer increases
Solution Approach 1:
The patent changes the chemical composition parameters by replacing CFC compounds with HFC compounds and trans-1,2-dichloroethylene in specific proportions (5-50% HFC-43-10mee, 50-95% trans-1,2-dichloroethylene). This parameter change maintains cleaning effectiveness while eliminating ozone-depleting chlorine-containing compounds, thus resolving the contradiction between cleaning effectiveness and environmental harm.
2Object-affected harmful factors
If hydrofluorocarbon (HFC) compounds are used to replace CFC compounds, then environmental safety regarding ozone layer is improved, but contribution to global warming increases
Solution Approach 1:
The patent creates a composite solvent system combining HFC-43-10mee and trans-1,2-dichloroethylene in specific ratios. This composite approach allows the mixture to achieve the desired cleaning performance while potentially reducing the overall environmental impact compared to using pure HFC compounds, as the trans-1,2-dichloroethylene component can be optimized to balance global warming potential with cleaning effectiveness.
3Object-affected harmful factors
If azeotropic compositions with high HFC content are used, then environmental safety is improved, but solubility of oils and contaminants decreases
Solution Approach 1:
The patent optimizes the compositional parameters by establishing specific concentration ranges: 5-50% HFC-43-10mee and 50-95% trans-1,2-dichloroethylene. This parameter optimization ensures that the solvent mixture maintains adequate solubility for oils and contaminants while reducing HFC content to improve environmental safety, thus resolving the contradiction between environmental safety and cleaning capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
These compositions offer enhanced solubility and environmental safety, effectively cleaning semiconductor surfaces without significant composition change during distillation, making them suitable for applications like defluxing and degreasing advanced packaging components.
Implementation Method 1
Azeotropic compositions comprising about 58-68 weight percent 1,1,1,2,3,4,4,5,5,5-decafluoropentane (HFC-43-10mee) and about 32-42 weight percent trans-1,2-dichloroethylene
Implementation Method 2
an amount effective in dissolving oils and contaminants of trans-1,2-dichloroethylene
Data Source
Figure 1
AI summary
Disclosed is an azeotrope-like composition comprising: from about 2% by weight to about 50% by weight of a hydrofluorocarbon selected from the group consisting of 1, 1,1, 2, 2, 3, 4, 5, 5, 5-decafluoropentane and 1, 1, 1, 3, 3-pentafluorobutane, from about 2% by weight to about 50% by weight 1, 1, 2, 2, 3, 3, 4-heptafluorocyclopentane, and an amount effective in dissolving oils and contaminants of trans-1,2-dichloroethylene. In another embodiment, are fluorocarbon solvent composition comprising from about 15 to about 99 weight percent 1, 1, 1, 2, 2, 3, 4, 5, 5, 5-decafluoropentane and from about 85 to about 1 percent by weight 1, 1, 2, 2, 3, 3, 4-heptafluorocyclopentane wherein the freezing point of the composition is less than 0 °C.