AZO/ITO Layer Stacks for Solar Cell Transparency and Conductivity

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Solution Overview

Problem

Existing TCO layers in solar cells face challenges in achieving high transparency, low resistance, and low contact resistance, with indium-based TCO being expensive and scarce, and existing deposition methods are costly and limited by process chamber constraints.

Innovation Solution

Employing a layer stack of thinly covered aluminum-doped zinc oxide (AZO) with indium tin oxide (ITO) to form a TCO layer, optimizing the layer structure through in-line coating with interpenetrating material flows to enhance conductivity and durability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If indium-based TCO layer is used to achieve high transparency and low resistance, then electrical conductivity is improved, but manufacturing cost increases and material availability decreases

Engineering Contradiction:
Improveelectrical conductivityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent changes the material composition parameters by replacing indium-based TCO with aluminum-doped zinc oxide (AZO), altering the chemical composition to achieve similar electrical conductivity properties while reducing dependence on expensive and scarce indium materials

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs AZO which is a cheaper and more abundant alternative to indium-based TCO materials, reducing manufacturing costs while maintaining the functional requirements for electrical conductivity in solar cell applications

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

2Illumination intensity

If TCO layer properties are optimized for high transparency, then light absorption is improved, but electrical conductivity decreases

Engineering Contradiction:
ImprovetransparencyVSAvoidelectrical conductivity
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The patent optimizes the doping concentration and layer thickness parameters of AZO to achieve a balance between transparency and electrical conductivity, adjusting these parameters to simultaneously satisfy optical and electrical performance requirements

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses aluminum-doped zinc oxide as a composite material that combines the transparency characteristics of zinc oxide with the conductivity enhancement provided by aluminum doping, achieving both high transparency and adequate electrical conductivity

Inventive Principle:
Principle #40Composite materials

3Reliability

If TCO layer contact resistance is reduced, then charge carrier transport is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvecontact resistanceVSAvoidlayer structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent optimizes the local properties of the AZO layer at the interface with the metallic grid and underlying a-Si layer, adjusting doping concentration and thickness in these specific regions to achieve low contact resistance while keeping the rest of the layer structure relatively simple

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The AZO/ITO layer stack achieves comparable efficiency to pure ITO while reducing costs and overcoming aging issues, offering a more cost-effective and efficient TCO layer solution.

Implementation Method 1

forming a transparent, electrically conductive first layer including oxygen and indium on the solar cell precursor; forming one or more than one transparent, electrically conductive second layer including oxygen and having a greater proportion of indium

Methodology Applied
Scientific EffectSputtering: Sputtering

Data Source

PatentUS20250324814A1Method of forming transparent layers for a solar cell
Publication Date: 2025.10.16 VON ARDENNE ASSET GMBH & CO KG
  • US20250324814A1 patent drawing
  • US20250324814A1 patent drawing
  • US20250324814A1 patent drawing

AI summary

Disclosed herein are devices, systems, and methods for processing a solar cell precursor. The processing may include forming a transparent, electrically conductive first layer over the solar cell precursor. The processing may also include forming a transparent, electrically conductive second layer over the solar cell precursor, preferably in physical contact with the first layer. The first layer may comprise at least indium, zinc, and oxygen and the second layer may comprise oxygen and a greater proportion of indium than the first layer.