Backend NEMS Switch Interconnects for Reconfigurable IC Routing

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Solution Overview

Problem

Conventional integrated circuit (IC) interconnect structures in backend layers are fixed and cannot be modified, limiting the versatility and performance of semiconductor devices as they are scaled to smaller features.

Innovation Solution

Embedding nanoelectromechanical system (NEMS) switches, specifically backend NEMS switches, in backend layers of IC structures to enable dynamic modification of electrical connections through mechanical motion, allowing for faster switching speeds and lower power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional fixed interconnect structures are used in backend layers, then manufacturing simplicity is maintained, but versatility and performance are limited

Engineering Contradiction:

Improveversatility of IC structuresVSAvoidcomplexity of interconnect structures

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent transforms fixed backend interconnect structures into dynamic, reconfigurable structures by integrating NEMS switches. These switches enable the interconnects to change their electrical connection states dynamically, allowing the same physical structure to serve multiple routing configurations and adapt to different operational requirements, thereby resolving the contradiction between versatility and complexity.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent implements multi-functional backend interconnect structures where the same physical interconnect layer can serve multiple routing functions through the integration of NEMS switches. The switches enable a single interconnect structure to perform multiple logical routing tasks, increasing versatility without proportionally increasing physical complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Quantity of substance

If transistor size is shrunk to increase device density, then capacity is improved, but fabrication optimization becomes increasingly significant and difficult

Engineering Contradiction:

Improvedevice densityVSAvoidfabrication optimization

Core Design Contradiction:

Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent replaces conventional electronic switching mechanisms with nanoelectromechanical switches in the backend interconnect layer. This substitution allows for larger effective switching dimensions at the backend compared to frontend transistors, easing fabrication constraints while maintaining high device density achieved through frontend transistor scaling.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Speed

If backend interconnect structures are made fixed, then manufacturing simplicity is maintained, but switching speed and power consumption performance deteriorate

Engineering Contradiction:

Improveswitching speedVSAvoidpower consumption

Core Design Contradiction:

SpeedVSUse of energy by moving object

Solution Approach 1:

The patent introduces dynamic reconfigurability to backend interconnect structures through NEMS switches, enabling fast switching between different routing states. The nanoelectromechanical switches provide rapid state transitions with lower power consumption compared to conventional electronic switches, directly addressing the performance requirements for speed and energy efficiency.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the versatility and performance of IC structures by enabling dynamic control of electrical connections, achieving faster switching speeds and reduced power consumption, which is critical for miniaturized semiconductor devices.

Implementation Method 1

Methodology Applied

Scientific EffectMechanical motion:

Implementation Method 2

When actuated, the cantilever of a backend NEMS switch may move to physically open or close the electrical circuit, thereby controlling the flow of current

Methodology Applied

Scientific EffectElectrical conduction control:

Data Source

PatentUS20250336616A1Integrated circuit structures with backend nanoelectromechanical system switches

Publication Date: 2025.10.30 INTEL CORP

AI summary

Disclosed herein are NEMS switches embedded in backend layers of IC structures (backend NEMS switches). A backend NEMS switch includes one or more moveable nanoscale cantilevers that can be actuated to make or break electrical connections, thus controlling the flow of electrical current. Cantilevers may be suspended or anchored between electrodes and can be moved or deflected by applying electrical, mechanical, or thermal stimuli. An example IC structure may include an insulator material, first and second interconnects embedded in the insulator material, and a backend NEMS switch. The backend NEMS switch may include a middle element, a cantilever extending from the middle element, and one or more control elements. The middle element is connected to the first interconnect and, depending on a stimulus applied to the one or more control elements, the cantilever is either electrically connected to or electrically disconnected from the second interconnect.