Baffle Plate Assembly for ALD Showerheads

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Solution Overview

Problem

The small diameter of baffle plates in ALD showerheads makes welding and weld cleanup challenging, leading to potential damage, geometrical degradation, and fluorine attack during use.

Innovation Solution

A baffle plate assembly with a ring and support members that eliminates the need for welding to the baffle plate, using friction stir welding or swage tabs to secure the ring and support members to the stem and top plate, providing stronger welds and reducing the risk of damage and fluorine degradation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If welding is used to attach standoff members to the baffle plate, then the baffle plate can be secured in position, but the baffle plate may be damaged, warped, or cracked due to the small diameter and delicate structure

Engineering Contradiction:

Improvesecuring of baffle plateVSAvoiddamage to baffle plate

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a ring component as an intermediary element that receives the standoff members through its thickness. This ring acts as a mediator between the standoff members and the baffle plate, allowing the standoff members to be secured to the ring rather than directly to the delicate baffle plate, thereby preventing damage to the baffle plate while maintaining structural integrity

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent divides the support structure into separate functional components: the baffle plate for gas distribution, the ring for structural support and standoff member reception, and the standoff members for positioning. This segmentation allows each component to be optimized for its specific function without compromising the others, particularly protecting the baffle plate from welding damage

Inventive Principle:

Principle #1Segmentation

2Ease of manufacture

If welding and weld cleanup are performed on the baffle plate, then the standoff members can be attached, but the surface of the baffle plate may be damaged and geometrical degradation may occur

Engineering Contradiction:

Improveattachment of standoff membersVSAvoidsurface quality of baffle plate

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The ring serves as an intermediary that absorbs the welding and cleanup operations. The standoff members are welded to the ring, not the baffle plate, so any surface damage or geometrical degradation from welding and cleanup affects only the ring, which can be replaced or machined without affecting the critical gas distribution surface of the baffle plate

Inventive Principle:

Principle #24Intermediary (Mediator)

3Strength

If filler material is used in welding the baffle plate to standoff members, then the attachment can be strengthened, but the filler material is susceptible to fluorine attack and degradation during use

Engineering Contradiction:

Improveweld strengthVSAvoidresistance to fluorine attack

Core Design Contradiction:

StrengthVSReliability

Solution Approach 1:

The ring acts as an intermediary that replaces the need for filler material in the critical baffle plate attachment. The standoff members are attached to the ring without requiring filler material that would be exposed to fluorine, thereby eliminating the vulnerability to fluorine attack and degradation while maintaining strong attachments through direct welding or interference fits

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution prevents damage to the baffle plate during assembly, eliminates the need for weld cleanup, and reduces the risk of fluorine attack, resulting in stronger and more reliable baffle plate assemblies with improved durability and performance.

Implementation Method 1

The ring and support members hold the baffle plate in a position between a top plate and a bottom plate of the showerhead

Methodology Applied

Scientific EffectMechanical support: Mechanical Force

Implementation Method 2

using friction stir welding or swage tabs to secure the ring and support members to the stem and top plate

Methodology Applied

Scientific EffectFriction stir welding: Friction Welding

Data Source

PatentUS10483092B2Baffle plate and showerhead assemblies and corresponding manufacturing method

Publication Date: 2019.11.19 LAM RES CORP

AI summary

A baffle plate assembly including a baffle plate, a ring and support members. The baffle plate has an outer diameter and configured to distribute gases through a showerhead of a showerhead assembly of a substrate processing system. The gases are received from a stem of the showerhead assembly. The ring has an inner diameter and configured to be disposed in a ring channel of the showerhead assembly. The inner diameter is greater than the outer diameter of the baffle plate. The support members extend from the baffle plate to the ring. The ring and the support members hold the baffle plate in a position between a top plate and a bottom plate of the showerhead.