BAW Resonators With Patterned Mass Loading for Frequency Tuning
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Solution Overview
Problem
Manufacturing bulk acoustic wave (BAW) resonators with different resonant frequencies involves complex and costly processing steps, particularly when multiple resonators with varying frequencies are produced on a common die.
Innovation Solution
The use of patterned mass loading layers with different densities, formed in a common processing step, to adjust the resonant frequencies of BAW resonators, allowing for precise control and reduction in manufacturing complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple BAW resonators with different resonant frequencies are manufactured on a common die using conventional processing steps, then diverse resonant frequencies are achieved, but the number of processing steps and manufacturing complexity increase significantly
Solution Approach 1:
The patent applies local quality by introducing patterned mass loading layers with varying densities at specific locations on the common die. Each resonator receives a tailored mass loading pattern (different densities, geometries, or distributions) that locally adjusts its resonant frequency without requiring different processing steps for each resonator. This allows multiple resonators with diverse frequencies to be manufactured using a single set of processing steps.
Solution Approach 2:
The patent utilizes parameter changes by varying the density, geometry, or distribution parameters of the mass loading layers to tune resonant frequencies. By changing these physical parameters of the mass loading structures rather than changing the processing steps themselves, the invention achieves diverse resonant frequencies while maintaining manufacturing simplicity.
2Adaptability or versatility
If multiple BAW resonators with different resonant frequencies are manufactured on a common die using conventional processing steps, then diverse resonant frequencies are achieved, but manufacturing costs increase
Solution Approach 1:
The patent applies local quality by introducing patterned mass loading layers with varying densities at specific locations on the common die. Each resonator receives a tailored mass loading pattern (different densities, geometries, or distributions) that locally adjusts its resonant frequency without requiring different processing steps for each resonator. This allows multiple resonators with diverse frequencies to be manufactured using a single set of processing steps.
Solution Approach 2:
The patent utilizes parameter changes by varying the density, geometry, or distribution parameters of the mass loading layers to tune resonant frequencies. By changing these physical parameters of the mass loading structures rather than changing the processing steps themselves, the invention achieves diverse resonant frequencies while maintaining manufacturing simplicity.
3Device complexity
If patterned mass loading layers with different densities are formed in a common processing step, then resonant frequencies are precisely controlled and manufacturing complexity is reduced, but the processing step complexity increases
Solution Approach 1:
The patent applies local quality by introducing patterned mass loading layers with varying densities at specific locations on the common die. Each resonator receives a tailored mass loading pattern (different densities, geometries, or distributions) that locally adjusts its resonant frequency without requiring different processing steps for each resonator. This allows multiple resonators with diverse frequencies to be manufactured using a single set of processing steps.
Solution Approach 2:
The patent replaces complex multi-step mechanical processing with a single deposition or formation process that directly creates patterned mass loading layers with controlled densities. This substitution of the manufacturing approach simplifies the overall process while maintaining precise control over resonant frequencies through the patterned structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the number of processing steps and costs while enabling flexible tuning of resonant frequencies, facilitating the production of BAW resonators with diverse frequencies for various applications.
Implementation Method 1
The first patterned mass loading layer impacts a resonant frequency of the first bulk acoustic wave resonator. The second patterned mass loading layer impacts a resonant frequency of the second bulk acoustic wave resonator.
Implementation Method 2
In BAW resonators, acoustic waves propagate in a bulk of a piezoelectric layer.
Data Source
AI summary
Aspects of this disclosure relate to bulk acoustic wave resonators with patterned mass loading layers. Two different bulk acoustic wave resonators of an acoustic wave filter and/or an acoustic wave die have respective patterned mass loading layers with different densities. The patterned mass loading layers contribute to the two different bulk acoustic wave resonators having different respective resonant frequencies. Related bulk acoustic wave devices, filters, acoustic wave dies, radio frequency modules, wireless communication devices, and methods are disclosed.