Charged Particle Beam Apparatus Automatic Parameter Derivation
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Solution Overview
Problem
Existing charged particle beam apparatuses face inefficiencies in processing multiple samples due to the need for frequent adjustments of various conditions, such as optical settings, whenever a sample is changed, leading to decreased work efficiency.
Innovation Solution
A charged particle beam apparatus that includes an irradiation unit, an image formation section, an input reception unit, and a control unit capable of deriving and applying second observation parameters based on received observation conditions and stored first observation parameters, allowing for automatic adjustment of beam settings and detection conditions to optimize sample processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If various observation conditions are manually adjusted for each sample, then observation quality is maintained, but work efficiency decreases
Solution Approach 1:
The system stores optimal observation parameters in advance for different sample types in a storage unit. When a new sample is introduced, the system retrieves pre-stored parameters matching the sample type, eliminating the need for manual adjustment and enabling immediate observation with optimal settings.
Solution Approach 2:
The derivation section automatically derives appropriate observation parameters by comparing received observation conditions with stored first observation parameters. The system self-adjusts parameters without operator intervention, selecting optimal settings based on the sample type and observation requirements.
2Measurement precision
If manual adjustment of optical conditions is performed for each sample, then observation accuracy is maintained, but operational complexity increases
Solution Approach 1:
The system automatically derives and sets optimal observation parameters by comparing received observation conditions with pre-stored parameters. The derivation section performs parameter optimization without operator intervention, maintaining observation accuracy while eliminating manual adjustment operations.
Solution Approach 2:
The control unit receives observation conditions, compares them with stored parameters, and automatically adjusts settings based on the derived parameters. This closed-loop system ensures optimal observation conditions are maintained while reducing operational complexity through automated feedback-based parameter selection.
Data Source
AI summary
A charged particle beam apparatus includes: an irradiation unit that irradiates a sample with a charged particle beam; an image formation section that detects a charged particle generated from the sample due to the irradiation with the charged particle beam and forms an image based on a signal obtained by detecting the charged particle; an input reception unit that receives an observation condition; a derivation section that derives second observation parameters proper for the observation condition based on the received observation condition and first observation parameters stored in a storage unit; and a control unit that controls the irradiation unit based on the second observation parameters.