Charged Particle Beam Apparatus Center of Rotation Correction
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Solution Overview
Problem
Charged particle beam apparatuses face challenges in maintaining a consistent irradiation position due to changes in the center of rotation caused by mechanical precision and intersection issues during sample rotation, leading to potential deviations in processing or observation positions.
Innovation Solution
A charged particle beam apparatus with a stage and securing member rotation unit that corrects positional deviations by acquiring and applying correction values based on pre- and post-rotation positions around multiple axes, using table data to maintain the irradiation position and prevent changes in the center of rotation, thereby ensuring precise positioning during three-dimensional processing or observation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the sample is rotated around multiple rotating axes to enable three-dimensional processing or observation, then the adaptability and functionality of the charged particle beam apparatus are improved, but the manufacturing precision and stability of the irradiation position deteriorate due to changes in the center of rotation
Solution Approach 1:
The system performs preliminary measurement of the center of rotation position before rotation, and pre-calculates the correction values for stage translation. This allows the irradiation position to be maintained by applying the correction in advance, compensating for the center of rotation changes that will occur during rotation operations.
Solution Approach 2:
The system measures the actual center of rotation position, compares it with the reference position, and uses the deviation information to calculate correction values. This feedback mechanism ensures that the irradiation position is continuously maintained despite changes in the center of rotation during multi-axis rotation.
2Reliability
If the center of rotation position is corrected through stage translation, then the irradiation position stability is improved, but the device complexity increases due to the need for correction value calculation and stage coordination
Solution Approach 1:
The stage serving unit performs multiple functions: it not only translates the stage for positioning but also applies correction values to maintain the irradiation position. This multi-functionality reduces the need for separate correction mechanisms, thereby limiting device complexity while improving irradiation position stability.
Solution Approach 2:
The system changes the translation parameters of the stage based on calculated correction values. By dynamically adjusting the stage position parameters in response to center of rotation changes, the system maintains irradiation stability without requiring complex mechanical correction devices.
3Measurement precision
If correction values are calculated based on pre-rotation and post-rotation positions, then the measurement precision of the center of rotation is improved, but the loss of time increases due to the additional measurement and calculation steps
Solution Approach 1:
The system performs preliminary measurement of the center of rotation position and pre-calculates correction values before actual rotation operations. This allows the correction to be applied immediately during rotation, reducing the time loss that would otherwise occur during real-time correction while maintaining high measurement precision.
Data Source
AI summary
Provided is a charged particle beam apparatus including a focused ion beam column, a sample holder, a stage supporting the sample holder, a securing member rotating unit, a stage driving unit, and a control device. The sample holder includes a securing member fixing a sample. The securing member rotating unit rotates the securing member around a first rotational axis and a second rotational axis. The stage driving unit translates the stage in three dimensions and rotates the stage around a third rotational axis. The control device acquires a correction value for correcting a change in a position of a center of rotation for rotation around at least one among a first rotational axis, a second rotational axis, and a third rotational axis. The control device translates the stage according to the correction value.