Beam Bender Curved Electrodes Electron Ray Convergence
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Solution Overview
Problem
Existing beam benders for electron rays in electron microscopes suffer from low convergence properties, leading to significant misalignment of electron trajectories, which complicates the arrangement of primary and secondary optical systems in limited spaces.
Innovation Solution
A beam bender design featuring inner and outer electrodes with curved surfaces, where the curvatures and centers of curvature are matched in specific cross-sections to generate an electric field for bending electron rays, improving convergence by adjusting the radii of curvature in different sections to minimize misalignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a beam bender using a Wien filter or magnetic field is used to separate electron trajectories, then the trajectories can be separated in limited space, but larger aberration and dispersion occur as the bending angle increases
Solution Approach 1:
The patent applies different curvatures to different parts of the electrode surfaces. The inner electrode has a first curvature in the cross-section along the electron ray direction and a second curvature in the cross-section perpendicular to it, with the second curvature being larger than the first. This local variation in curvature optimizes the electric field distribution to reduce aberration and dispersion while maintaining trajectory separation in limited space.
Solution Approach 2:
The patent changes the geometric parameters of the electrodes, specifically the curvatures in different directions. By setting the second curvature (in the perpendicular cross-section) to be larger than the first curvature (in the travel direction cross-section), and matching the centers of curvature, the electric field is optimized to minimize aberration and dispersion effects during electron trajectory bending.
2Volume of moving object
If the trajectory of the secondary electron is bent by a large degree to arrange optical systems in limited space, then the optical systems can be arranged, but the convergence property of the electron ray deteriorates
Solution Approach 1:
The patent employs different curvatures in different spatial directions to optimize both the bending capability and convergence property. The inner electrode has a first curvature in the cross-section along the electron ray direction and a second curvature in the perpendicular cross-section, with the second being larger. This anisotropic curvature design allows large bending angles while maintaining good convergence by appropriately shaping the electric field in different directions.
Solution Approach 2:
The patent uses curved surfaces for both inner and outer electrodes with specifically designed curvature characteristics. The centers of curvature of both electrodes are matched, and the ratio between the curvatures in different directions is controlled. This curvature-based design enables the electric field to bend electron trajectories effectively while maintaining convergence, avoiding the misalignment problems associated with conventional flat or uniformly curved electrodes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances the convergence property of electron rays, reducing misalignment and improving spectral characteristics, making it suitable for use in electron microscopes and spectrometers.
Implementation Method 1
bending an electron ray that passes between the inner curved surface and the outer curved surface by an electric field that is generated when different electrical potentials are applied to the inner electrode and the outer electrode
Data Source
AI summary
In a first cross section along an electron ray that passes between an inner curved surface and an outer curved surface of a beam bender, the curvature of the surfaces are fixed, and the center of the curvature of the surfaces are set so as to match each other. In a second cross section perpendicular to the electron ray, the curvature of the surfaces are fixed, and the center of curvature of the surfaces are set so as to match each other. The radius of the curvature of the surface in the second cross section is set to be larger than that of the surface in the first cross section. The radius of curvature of the surface in the second cross section is set to be larger than that of the surface in the first cross section.