Charged Particle Beam Device Compact Housing Camera Integration
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The challenge is to observe the same field of view with a charged particle beam device and a camera without increasing the size of the vacuum housing, as existing solutions face difficulties in integrating a camera close to the objective lens of the charged particle beam device due to focal length constraints and vacuum compatibility issues, particularly in small-sized devices.
Innovation Solution
The implementation of an axis shifting sample table and/or a mirror configuration allows for a shorter virtual optical axis distance between the sample table and the camera, enabling the same field of view observation without enlarging the housing by adjusting the central axes and using a mirror to virtually align the camera's optical axis with the charged particle beam device's optical axis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the camera is mounted in a small-sized vacuum housing, then the device size is limited for desktop placement, but only an end of the sample can be observed in the camera
Solution Approach 1:
The patent introduces a virtual optical axis concept that allows the camera to observe the sample from a virtual position different from its physical position. By defining virtual central axes for both the sample table and imaging unit, the system enables the camera to capture the entire sample area without physically relocating the camera or enlarging the housing, thus resolving the contradiction between compact housing size and complete sample observation capability
2Length of stationary object
If the camera is brought close to the objective lens of the SEM, then the focal length constraint is considered, but it may be difficult to introduce the camera in vacuum
Solution Approach 1:
The patent introduces a virtual optical axis as an intermediary concept that decouples the physical positioning requirements from the optical observation requirements. This allows the camera to remain at a physically accessible position within the vacuum housing while achieving the desired optical alignment through virtual axis definition, thus resolving the contradiction between proximity to the objective lens and vacuum compatibility
Data Source
AI summary
An object of the invention is to provide a device for observing the same field of view with a charged particle beam device and a camera without increasing a size of a housing. A charged particle beam device according to an aspect of the invention includes: a lens barrel that irradiates a sample with a charged particle beam; an imaging unit that images an optical image of the sample; a sample table on which the sample is placed; and a stage that is movable and on which the sample table is placed, wherein when a distance between a physical central axis of the sample table and a physical optical axis of the imaging unit is defined as a first distance, and a distance between a virtual central axis of the sample table and a physical central axis of the imaging unit, or between the physical central axis of the sample table and a virtual central axis of the imaging unit, or between the virtual central axis of the sample table and the virtual central axis of the imaging unit is defined as a second distance, the second distance is shorter than the first distance.