Charged Particle Beam Deflection Device Optical Signal Control
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Solution Overview
Problem
Current charged particle beam deflection devices face challenges in efficiently controlling multi-electron beams for high-throughput lithography due to increased signal wiring density and narrower beam pitch, requiring innovative solutions for precise blanking and deflection control.
Innovation Solution
A charged particle beam deflection device incorporating a substrate with apertures, electrodes, light-receiving elements, and optical couplers that utilize continuous light for modulating and distributing optical signals to control the deflection electrodes, allowing for efficient blanking and beam control without the need for multiple light sources, thereby stabilizing the light output and ensuring stable operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple light sources are used to control each deflection electrode independently, then precise control of multi-electron beams is achieved, but device complexity and cost increase significantly
Solution Approach 1:
Multiple light sources are merged into a single light source. The patent uses one light source that emits light divided into multiple beams, with each beam controlling a corresponding deflection electrode. This combining approach maintains precise control capability while reducing device complexity and cost.
Solution Approach 2:
The light from a single source is segmented into multiple separate beams. The patent divides the light from one source into multiple beams using optical elements, where each beam can be independently modulated to control specific deflection electrodes, achieving precise control without needing multiple light sources.
2Adaptability or versatility
If optical wiring is used for blanking control signals to cope with higher wiring density, then control capability for multi-beam systems is improved, but signal transmission stability may be affected by optical coupling efficiency
Solution Approach 1:
Optical waveguides serve as intermediary elements to transmit control signals from the single light source to multiple deflection electrodes. The patent uses optical waveguides to efficiently couple and distribute optical signals, ensuring stable signal transmission while enabling high-density wiring control for multi-beam systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise control of multi-electron beams by converting continuous light into optical signals to apply voltages to deflection electrodes, allowing for effective blanking and beam deflection, improving throughput and stability in lithography processes.
Implementation Method 1
a plurality of light-receiving elements controlling voltages applied to the plurality of electrodes
Implementation Method 2
a first optical coupler coupling continuous light to the substrate; a light distributor distributing light coupled by the first optical coupler into a two-dimensional plane
Implementation Method 3
a plurality of modulators performing intensity modulation of light distributed by the light distributor
Implementation Method 4
a plurality of electrodes deflecting charged particle beams passing through the apertures
Data Source
AI summary
A charged particle beam deflection device includes a substrate; a plurality of apertures provided in the substrate; a plurality of electrodes deflecting charged particle beams passing through the apertures; a plurality of light-receiving elements controlling voltages applied to the plurality of electrodes; a first optical coupler coupling continuous light to the substrate; a light distributor distributing light coupled by the first optical coupler into a two-dimensional plane; a plurality of modulators performing intensity modulation of light distributed by the light distributor; and a plurality of second optical couplers coupling the modulated light to the light-receiving elements.