Beam Deflection Device Using Slow-Light Waveguides

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Solution Overview

Problem

Current three-dimensional measurement and laser manufacturing applications require high-power, compact semiconductor devices capable of scanning laser beams without movable or optical components, which is challenging due to the need for high beam quality and output.

Innovation Solution

A beam deflection device utilizing multiple linear slow-light waveguides with rectangular outlet openings, where the resonance wavelength and wavelength of slow light are controlled to generate and scan interference patterns, allowing for compact, high-power laser beam scanning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional laser scanning systems are used, then beam quality and output can be maintained, but device size becomes large and requires movable components

Engineering Contradiction:
Improvedevice sizeVSAvoidbeam quality
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The device segments the laser beam into multiple wavelength components using a diffraction grating, with each wavelength component directed to a dedicated waveguide. This segmentation allows each waveguide to be optimized for its specific wavelength, maintaining beam quality while enabling compact integration of multiple scanning channels without requiring large movable components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention replaces mechanical scanning systems with a stationary optical system using diffraction gratings and waveguides. The diffraction grating spatially separates wavelengths, and the waveguide array directs each wavelength to different scanning positions, eliminating the need for movable mirrors or galvanometers while maintaining scanning functionality and beam quality.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Power

If high-power laser output is achieved, then manufacturing capability is improved, but beam quality deteriorates

Engineering Contradiction:
Improvelaser outputVSAvoidbeam quality
Core Design Contradiction:
PowerVSManufacturing precision

Solution Approach 1:

The high-power laser beam is segmented into multiple wavelength components, with each component channeled through its own waveguide. This allows the total power to be distributed across multiple lower-power wavelength channels, each maintaining good beam quality, while the combined output achieves the required high power for manufacturing applications.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention changes the wavelength parameter of the laser light by using a diffraction grating to separate the input laser into multiple wavelengths. Each wavelength component is then processed independently through dedicated waveguides, allowing optimization of beam quality for each wavelength while maintaining high overall output power.

Inventive Principle:
Principle #35Parameter changes

3Volume of moving object

If device size is reduced, then compactness is improved, but scanning range is limited

Engineering Contradiction:
Improvedevice sizeVSAvoidscanning range
Core Design Contradiction:
Volume of moving objectVSAdaptability or versatility

Solution Approach 1:

The invention adds a wavelength dimension to the scanning system. By using a diffraction grating to separate light into multiple wavelengths and directing each wavelength to different spatial positions through the waveguide array, the system achieves extended scanning range in the spatial domain without increasing physical device size, as the wavelength multiplexing provides an additional degree of freedom for beam steering.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The waveguide array serves multiple functions simultaneously: it acts as a wavelength demultiplexer, a beam director, and a scanning mechanism. Each waveguide handles a specific wavelength and directs it to a particular scanning position, allowing the compact device to achieve wide scanning coverage through the combined spatial and spectral dimensions.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves efficient scanning of high-power laser beams with improved beam quality and reduced device size, expanding the interference pattern scanning range and supporting high-output operations.

Implementation Method 1

linear slow-light waveguides... allow the resonance wavelength of the linear slow-light waveguides and the wavelength of slow light generated as a propagating wave that propagates through the linear slow-light waveguides to be relatively controlled

Methodology Applied
Scientific EffectAcousto-optic interaction: Acousto-optic Effect

Data Source

PatentUS11506839B2Beam deflection device
Publication Date: 2022.11.22 TOKYO INST OF TECH
  • US11506839B2 patent drawing
  • US11506839B2 patent drawing
  • US11506839B2 patent drawing

AI summary

A beam deflection device includes multiple light-emission structures arranged adjacent to each other in a first direction (X direction). The light-emission structures are each configured to be capable of emitting, from its device surface, a line beam that extends in the first direction in the far field. Furthermore, the light-emission structures are each configured to allow the line beam to be scanned in a second direction (Y direction) that is orthogonal to the first direction.