Charged Particle Beam Detector Azimuth Rotation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing scanning electron microscopes have a fixed detector layout that is not optimized for various types of patterns, leading to suboptimal evaluation of VIT and line patterns, resulting in reduced accuracy and signal-to-noise ratio.
Innovation Solution
A charged particle beam apparatus with a rotation member that magnetically, electrically, or mechanically adjusts the detected azimuth angle of secondary particles, allowing for customizable detector layouts to suit different patterns, enabling simultaneous accurate observation and evaluation of VIT and line patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed detector layout is used in scanning electron microscopes, then the device structure is simple, but the measurement precision and signal-to-noise ratio are reduced for various types of patterns
Solution Approach 1:
The patent applies the dynamics principle by making the detector layout changeable rather than fixed. A rotation member is introduced to rotate detectors around the optical axis, allowing the detection azimuth angle to be dynamically adjusted according to different observation requirements. This resolves the contradiction by enabling high measurement precision for various patterns while maintaining relatively simple device structure through controlled motion.
Solution Approach 2:
The patent applies parameter changes by varying the detection azimuth angle parameter to optimize measurement precision for different patterns. By changing the angular parameter of detector positioning, the system achieves high measurement precision for both VIT patterns and line patterns without requiring completely different detector configurations, thus avoiding excessive device complexity.
2Adaptability or versatility
If detectors are fixed at specific positions, then the device structure is simple, but the adaptability to different patterns (VIT and line patterns) is reduced
Solution Approach 1:
The rotation member enables detectors to be dynamically repositioned around the optical axis, providing adaptability to different patterns such as VIT and line patterns. This dynamic adjustment capability allows a single detector configuration to serve multiple observation purposes without increasing overall device complexity significantly.
Solution Approach 2:
The patent implements universality by designing a detector system that can perform multiple functions through rotation. The same detectors can be positioned at different azimuth angles to optimize observation of various pattern types, making the device versatile without requiring separate dedicated detector sets for each pattern type.
3Measurement precision
If the detector layout is optimized for one pattern type, then the measurement precision for that pattern is high, but the evaluation accuracy for other pattern types deteriorates
Solution Approach 1:
The rotation member allows the detector layout to be dynamically optimized for the current observation target. When observing VIT patterns, detectors can be positioned at azimuth angles optimized for VIT, and when observing line patterns, the detectors rotate to positions optimized for line patterns, thus maintaining high measurement precision across different pattern types.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for optimized detection of secondary particles across various azimuth angles, improving the accuracy and signal-to-noise ratio for both VIT and line patterns, enabling more precise measurement and evaluation.
Implementation Method 1
a rotation member that magnetically, electrically, or mechanically changes a detected azimuth angle in the detector of the secondary particles emitted from the sample
Data Source
AI summary
Provided is a charged particle beam apparatus which includes a charged particle source, a sample table on which a sample is placed, a charged particle beam optical system that includes an objective lens and emits a charged particle beam emitted from the charged particle source onto the sample, a plurality of detectors which detect secondary particles emitted from the sample when being irradiated with the charged particle beam, and a rotation member which magnetically, electrically, or mechanically changes a detected azimuth angle of the secondary particles emitted from the sample.