Charged Particle Beam Detector Positioning for Sample Holder Interference
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Solution Overview
Problem
In electron microscopes, the placement of EDS detectors close to the sample is hindered by mechanical interference with various sample holders, limiting the detection solid angle and efficiency.
Innovation Solution
A charged particle beam system that includes a controller to determine the optimal analysis position for the EDS detector based on the type of sample holder, using information from signal lines, storage, or manual input, to minimize interference and maximize detection efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the EDS detector is placed closer to the sample to increase the detection solid angle, then the detection efficiency is improved, but mechanical interference with the sample holder occurs
Solution Approach 1:
The system dynamically adjusts the detector position based on the sample holder type. The controller receives information about the sample holder type and automatically determines the optimal analysis position, allowing the detector to be placed as close as possible without causing mechanical interference. This dynamic adaptation resolves the contradiction by making the position flexible rather than fixed.
Solution Approach 2:
The system changes the positional parameter of the detector based on the sample holder type. By receiving information about the sample holder and determining the appropriate analysis position, the system optimizes the distance between the detector and sample, maximizing detection efficiency while avoiding mechanical interference.
2Measurement precision
If the detector active area is increased to improve detection efficiency, then the detection solid angle increases, but the distance to the sample must be reduced which may cause mechanical interference
Solution Approach 1:
The system dynamically determines the optimal distance based on the sample holder type. Rather than using a fixed distance, the controller adjusts the detector position according to the specific sample holder configuration, allowing the system to achieve the minimum necessary distance for maximum detection solid angle without causing mechanical interference.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively increases the detection solid angle by reducing the distance between the detector and the sample while preventing mechanical interference, enhancing detection efficiency.
Implementation Method 1
detecting, in an analysis position, a signal produced from the sample by impingement of the charged particles on the sample
Implementation Method 2
When an electron beam is made to hit a sample, there are generated characteristic X-rays attributable to materials or elements constituting the sample
Data Source
AI summary
There is provided a charged particle beam system in which a detector can be placed in an appropriate analysis position. The charged particle beam system (100) includes: a charged particle source (11) for producing charged particles; a sample holder (20) for holding a sample (S); a detector (40) for detecting, in the analysis position, a signal produced from the sample (S) by impingement of the charged particles on the sample (S); a drive mechanism (42) for moving the detector (40) into the analysis position; and a controller (52) for controlling the drive mechanism (42). The controller (52) performs the steps of: obtaining information about the type of the sample holder (20); determining the analysis position on the basis of the obtained information about the type of the sample holder (20); and controlling the drive mechanism (42) to move the detector (40) into the determined analysis position.