Charged Particle Beam Device Camera-Based Outer Shape Extraction
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Solution Overview
Problem
Charged particle beam devices face challenges in accurately positioning the convergence point of the beam on a sample surface and in providing users with a clear understanding of the positional relationship between the sample surface and the beam, leading to reduced throughput and potential damage to samples.
Innovation Solution
A charged particle beam device equipped with an electron optics system, a movable stage, a detector, a camera, an extraction means for outer shape information, and a control unit that displays this information alongside the camera image, allowing for precise adjustment of the beam convergence and improved user understanding of sample positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the operator manually observes both the observation image and the camera image to adjust the sample table position, then the operator can control the positioning, but the throughput of inspection is reduced and the operator may accidentally damage the sample
Solution Approach 1:
The system performs automatic sample table positioning by extracting outer shape information from camera images and autonomously calculating the convergence point position, eliminating the need for manual operator intervention while maintaining high positioning accuracy and improving inspection throughput
2Extent of automation
If automatic detection of sample table position is implemented using reflectance differences, then automation is achieved, but versatility is reduced due to restrictions on reflectance properties and relative positional relations
Solution Approach 1:
The system uses optical camera imaging to create a visual copy of the sample and sample table positions, then processes this image data to determine the convergence point location, enabling automatic detection that is versatile and applicable to various sample types without restrictive assumptions about reflectance properties
Solution Approach 2:
The patent replaces mechanical or optical systems relying on reflectance differences with an image processing-based system that extracts geometric information from camera images, making the automatic detection more versatile and less constrained by physical properties of the samples
3Ease of operation
If the convergence point position is set on the sample table surface without visual feedback, then the system can control the movable stage, but the user cannot clearly grasp the position of the sample surface and accurately understand the movable degree
Solution Approach 1:
The system extracts outer shape information from camera images and provides visual feedback showing the relationship between the sample surface and convergence point position on the display, enabling users to accurately grasp positional relationships and make informed adjustments to the movable stage
Data Source
AI summary
The invention provides a charged particle beam device that can accurately move a convergence point of a charged particle beam to a surface of a sample and facilitates a user to grasp a positional relation between the surface of the sample and the convergence point of the charged particle beam. The charged particle beam device according to the invention includes: an electron optics system configured to irradiate a sample table with a charged particle beam; a movable stage on which the sample table is to be placed; a sample chamber that accommodates the movable stage; a detector configured to detect a signal from a sample placed on the sample table; a camera configured to capture an image of the sample table and the sample; an extraction means configured to extract outer shape information relating to outer shapes of the sample table and the sample from the image captured by the camera; a control unit configured to control the movable stage based on the outer shape information; and a display unit configured to display an image relating to the outer shape information together with the image captured by the camera.