Charged Particle Beam Device Top Plate Gap Design
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Solution Overview
Problem
Existing charged particle beam devices, such as scanning electron microscopes, face challenges in maintaining high-resolution imaging due to deformation and position deviation of the sample chamber top plate caused by pressure changes in the preliminary exhaust chamber, which affects the accuracy of charged particle beam irradiation and increases standby time.
Innovation Solution
A charged particle beam device is designed with a vacuum sample chamber and a preliminary exhaust chamber, where a gap is created between the top plate and the side wall near the preliminary exhaust chamber to prevent deformation transmission, using vacuum sealing materials and a laser interferometer for precise correction of displacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the top plate and side wall are in contact to maintain structural integrity, then the rigidity of the sample chamber is improved, but deformation and position deviation of the top plate occur due to force transmission from pressure changes in the preliminary exhaust chamber
Solution Approach 1:
The contact area between the top plate and side wall is segmented into multiple discrete contact points rather than a continuous contact surface. This is achieved by providing protrusions on the side wall that contact recesses on the top plate at specific locations, distributing the mechanical connection while preventing rigid force transmission that causes deformation.
Solution Approach 2:
The structural properties are made non-uniform: the side wall has localized protrusions at specific positions to provide discrete contact points, while the top plate has corresponding recesses. This creates local connection zones that maintain structural integrity without transmitting deformational forces across the entire structure.
2Ease of operation
If the sample chamber wall surface is provided with an opening portion for sample conveyance, then the ease of operation is improved, but the rigidity of the wall surface is reduced making it more susceptible to deformation
Solution Approach 1:
The wall structure is segmented with discrete protrusions and recesses that maintain structural integrity while accommodating the opening for sample conveyance. The contact points are strategically positioned to avoid the opening area while maintaining overall rigidity.
3Manufacturing precision
If the preliminary exhaust chamber is separated from the vacuum sample chamber to suppress deformation propagation, then the manufacturing precision is improved, but the device complexity increases
Solution Approach 1:
The preliminary exhaust chamber and vacuum sample chamber are merged into a single integrated structure rather than separate chambers. The separation of functions is achieved through internal structural design (protrusions and recesses) rather than physical separation, simplifying the overall device architecture while maintaining precision.
Data Source
AI summary
An object of the present disclosure is to provide a charged particle beam device that can suppress an influence to a device generated according to the preliminary exhaust. In order to achieve the object, suggested is a charged particle beam device including a vacuum sample chamber that maintains an atmosphere around a sample to be irradiated with a charged particle beam in a vacuum state; and a preliminary exhaust chamber to which a vacuum pump for vacuuming an atmosphere of the sample introduced into the vacuum sample chamber is connected, in which the vacuum sample chamber is a box-shaped body including a top plate, and a portion between the top plate and a side wall of the box-shaped body positioned below the top plate includes a portion in which the top plate and the side wall are not in contact with each other.