Beam Distributor for Multi-Region Optical Inspection

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Solution Overview

Problem

Optical inspection systems face challenges in providing uniform and efficient illumination to multiple regions, leading to issues with speckle and synchronization of light sources.

Innovation Solution

The system employs a multiplicity of cameras and illumination sources managed by a beam distributor, such as a polygon or monogon mirror, to combine and direct non-mutually coherent, spatially concentrated laser pulses to specific locations, ensuring synchronized strobed operation of cameras and reduced speckle through the use of beam combiners and fiber optic bundles.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If multiple illumination sources are used to illuminate multiple regions, then illumination coverage is improved, but speckle noise increases

Engineering Contradiction:
Improveillumination coverageVSAvoidspeckle noise
Core Design Contradiction:
Area of stationary objectVSObject-generated harmful factors

Solution Approach 1:

The illumination system divides the illumination task into multiple independent laser sources, each illuminating a specific region. The beam distributor separates the composite beam into multiple individual beams that are directed to different regions, allowing independent control of each illumination source to reduce speckle noise while maintaining comprehensive coverage

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple non-mutually coherent laser beams are combined into a single composite beam by the beam combiner, which then directs illumination to multiple regions simultaneously. This merging approach maintains the benefits of multiple sources while coordinating their operation to reduce speckle effects

Inventive Principle:
Principle #5Merging (Combining)

2Illumination intensity

If multiple illumination sources are used to illuminate multiple regions, then illumination intensity is improved, but synchronization complexity increases

Engineering Contradiction:
Improveillumination intensityVSAvoidsynchronization complexity
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

Multiple laser sources are combined into a single composite beam that is then distributed to multiple regions. This merging approach allows centralized control and synchronization at the beam distributor level, reducing the overall synchronization complexity compared to independently controlling multiple separate illumination paths

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The beam distributor serves multiple functions: it combines multiple laser beams, directs them to multiple regions, and provides synchronization control. This multi-functionality reduces the need for separate control systems for each illumination source, simplifying the overall synchronization architecture

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Illumination intensity

If spatially concentrated laser pulses are used, then illumination brightness is improved, but speckle noise increases

Engineering Contradiction:
Improveillumination brightnessVSAvoidspeckle noise
Core Design Contradiction:
Illumination intensityVSObject-generated harmful factors

Solution Approach 1:

The system uses spatially concentrated laser pulses for high brightness at each illumination point, but employs multiple non-mutually coherent sources with different spatial characteristics. Each source provides localized high-intensity illumination while the diversity of sources reduces overall speckle noise through incoherent combination

Inventive Principle:
Principle #3Local quality

4Productivity

If a beam distributor is used to direct beams to multiple regions, then illumination efficiency is improved, but system complexity increases

Engineering Contradiction:
Improveillumination efficiencyVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The beam distributor is designed to perform multiple functions: combining multiple laser beams, directing them to multiple regions, and providing synchronization control. This multi-functionality consolidates what would otherwise require multiple separate systems into a single integrated component, improving efficiency without proportionally increasing complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach provides high-brightness, low-speckle illumination to multiple regions, enhancing imaging quality and synchronization, and can be scaled for use in centralized systems serving multiple inspection machines.

Implementation Method 1

receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams

Methodology Applied
Scientific EffectLight: Light

Implementation Method 2

the beam distributor includes a polygon mirror. Alternatively, the beam distributor includes a monogon minor

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS9599572B2Optical inspection system and method
Publication Date: 2017.03.21 ORBOTECH LTD
  • US9599572B2 patent drawing
  • US9599572B2 patent drawing
  • US9599572B2 patent drawing

AI summary

An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.