Charged Particle Beam Illumination Setting via Reference Image Simulation
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Solution Overview
Problem
Charged particle beam apparatuses, such as scanning electron microscopes, lack a method to assist users in setting illumination conditions effectively, as they do not provide visual aids or simulations for understanding signal generation ranges, making it difficult for users to accurately set conditions, especially for those with limited knowledge.
Innovation Solution
A charged particle beam apparatus that includes a measurement unit, a reference image generator, and a display, which generates and displays a graphical user interface image showing the signal generation range and its size based on the illumination condition and specimen information, allowing users to visualize and set the illumination condition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If no visual aids or simulations are provided for setting illumination conditions, then the apparatus structure remains simple, but users cannot accurately understand signal generation ranges and set conditions properly
Solution Approach 1:
The patent creates a virtual copy of the signal generation range through simulation, allowing users to visualize the three-dimensional distribution of signal generation depths without physically modifying the apparatus. This virtual representation enables accurate understanding of illumination effects while maintaining simple hardware structure.
Solution Approach 2:
The patent introduces an intermediary simulation system that mediates between the user and the actual signal generation process. This intermediary provides visual feedback about signal generation ranges, enabling users to make informed setting decisions without directly observing the invisible electron beam interactions.
2Ease of operation
If simulation and visual display functions are added to assist setting, then user understanding of signal generation range improves, but the apparatus structure becomes more complex
Solution Approach 1:
The patent transforms the invisible three-dimensional signal generation process into a visual two-dimensional display representation. By projecting depth information onto a graphical interface, users can comprehend complex spatial distributions of signal generation without requiring complex physical visualization apparatus.
Solution Approach 2:
The patent replaces physical measurement and visualization mechanisms with computational simulation and digital display. Instead of using complex optical or mechanical systems to visualize electron beam interactions, the invention uses software-based simulation to generate and display signal generation range information.
3Measurement precision
If detailed simulation of signal generation range is provided, then measurement precision improves, but calculation and processing time increases
Solution Approach 1:
The patent performs preliminary calculations of signal generation ranges based on illumination conditions and specimen information before actual measurement. By pre-computing reference images showing expected signal generation depths, the system enables users to plan and optimize measurement parameters without time-consuming real-time simulations during actual operation.
Data Source
AI summary
A reference image is generated based on an illumination condition and element information of a specimen. The reference image includes a figure indicating a characteristic X-ray generation range, a numerical value indicating a characteristic X-ray generation depth, or the like. The reference image changes with a change of an accelerating voltage, a tilt angle, or an element forming the specimen. The reference image may include a figure indicating a landing electron scattering range, a figure indicating a back-scattered electron generation range, or the like.