Charged Particle Beam Imaging Surface Charging Control
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Solution Overview
Problem
Conventional charged particle beam imaging systems face challenges in maintaining stable and uniform surface charging conditions, leading to image quality issues such as distortion and lack of contrast due to excessive or uneven charging, which cannot be adequately addressed by existing pre-scan and post-scan charging regulation methods.
Innovation Solution
A method and system that utilize a first and second scanning beam to alternately scan a sample surface, with the second scanning beam applied during the time interval between the end of one scan line and the beginning of the next, to regulate surface charging conditions, ensuring a stable and uniform image quality by adjusting the charging condition before and/or after imaging scanning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a primary charged particle beam is used to scan and impinge on the sample surface, then image formation is achieved, but excessive or non-uniform surface charging occurs which deteriorates image quality
Solution Approach 1:
A second charged particle beam is introduced as an intermediary to regulate the surface charging condition. This second beam acts as a mediator between the primary imaging beam and the sample surface, adjusting the charging state to prevent excessive or non-uniform charging that would otherwise deteriorate image quality.
Solution Approach 2:
The second charged particle beam performs preliminary regulation of surface charging before the primary imaging beam scans the sample. By pre-adjusting the charging condition, the system prevents harmful charging effects from occurring during the main imaging process, thereby maintaining image quality.
2Reliability
If pre-scan and post-scan charging regulation methods are used, then surface charging condition is regulated, but imaging continuity and repeatability are compromised
Solution Approach 1:
The second charged particle beam operates continuously during the imaging process rather than only before or after. By maintaining continuous charging regulation throughout the scan, the system ensures both stable charging conditions and uninterrupted imaging, eliminating the need to stop for separate pre-scan or post-scan regulation steps.
Solution Approach 2:
The charging regulation system transitions from static pre-scan/post-scan methods to a dynamic continuous regulation approach. The second beam adapts its operation in real-time during the imaging scan, adjusting charging conditions dynamically to match the ongoing imaging process and maintain optimal conditions throughout.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables repeatable and continuous imaging with improved image quality by effectively managing surface charging, reducing distortion and enhancing contrast in charged particle beam imaging.
Implementation Method 1
A charged particle beam imaging system uses a charged particle beam, called primary charged particle beam, to scan and impinge on the surface of a sample, and then collects the secondary charged particles emitted from the sample to form an image
Implementation Method 2
a condenser lens to condense the generated charged particle beam
Implementation Method 3
an objective lens to focus the charged particle beam into a fine probe
Data Source
AI summary
A method for enhancing the quality of a charged particle microscopic image of a sample is disclosed. The image is formed by a charged particle beam imaging system. The method comprising: scanning, using a first scanning beam, a surface of the sample in at least one first scan line; and scanning, using a second scanning beam, the sample surface in at least one second scan line, wherein said second scanning beam is scanned across said sample surface during a time interval between the end of said first scan lines and the beginning of the next said first scan lines. Application of the proposed method as a charged particle beam imaging system is also disclosed.