Charged Particle Beam Measurement Equipment Size Correction
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Solution Overview
Problem
Charged particle beam measurement equipment faces challenges in achieving precise size correction due to linear assumptions in size variation errors, which can lead to inaccuracies in measurement results.
Innovation Solution
A standard sample with correction mark members of varying widths is used, where the widths differ from each other, allowing for the determination of correction functions based on measurement errors, enabling precise correction of measurement widths even if errors are nonlinear.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a standard sample with uniform groove widths is used for correction, then the correction process is simple and straightforward, but measurement precision deteriorates due to inability to account for nonlinear error variations
Solution Approach 1:
The patent changes the parameter of correction mark members from uniform width to variable widths. By providing correction mark members with different widths (e.g., first width, second width wider than first, third width narrower than first), the system can capture nonlinear error variations across different size ranges, thereby improving measurement precision while maintaining correction process simplicity
Solution Approach 2:
The correction standard is segmented into multiple correction mark members with different width characteristics. This segmentation allows the correction process to address different error regimes separately - narrow marks for one error range, wide marks for another - enabling more precise correction without complicating the overall process
2Measurement precision
If correction mark members with varying widths are used, then measurement precision is improved by accounting for nonlinear errors, but device complexity increases
Solution Approach 1:
Rather than creating a complex multi-component system, the patent achieves improved precision by changing a single parameter (width) of the correction mark members. The varying widths are directly incorporated into the standard sample structure, eliminating the need for additional complex correction mechanisms or multiple separate standards
Solution Approach 2:
The standard sample with varying width correction marks serves multiple functions simultaneously: it provides correction references for different size ranges, captures nonlinear error characteristics, and maintains a unified structure. This multi-functionality reduces the need for separate correction standards for different measurement conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for more accurate size correction in charged particle beam measurement equipment by determining correction functions from varying measurement widths, effectively addressing nonlinear error variations and improving measurement precision.
Implementation Method 1
a sample is irradiated with a charged particle beam to be thereby scanned, and a size data item on an area of the sample is obtained on the basis of data obtained from a secondary particle from the sample
Data Source
AI summary
Correction of widths obtained by measurement of a sample with the use of a scanning electron microscope is executed with greater precision. A standard sample for correction comprises a plurality of correction mark members, the respective correction mark members, being lined up at specified intervals in a specified direction, and respective widths thereof, in the specified direction, differing from each other so as to be of respective sizes as pre-set. Measurement of the respective widths of the correction mark members is made to obtain respective measurement widths while authorized widths of the correction mark members are kept stored in an image processing unit of the scanning electron microscope to thereby find differences between the respective measurement widths, and authorized widths corresponding thereto, and the differences are stored as respective correction functions to correct the measurement width of the sample.