Charged Particle Beam Parameter Matching Using a Learning Database
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Solution Overview
Problem
Conventional charged particle beam devices face challenges in efficiently obtaining optimum parameters due to the vast number of combinations of optical and configuration conditions, leading to lengthy matching operations.
Innovation Solution
A charged particle beam device equipped with an electron gun, an image processing unit, a database storing correspondence between optical conditions, device performance values, and configuration information, and a learning machine that searches the database to obtain optimal parameters efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If parameters are changed one by one and comparison is performed until optical conditions match, then measurement precision is improved, but time consumption increases significantly
Solution Approach 1:
The patent pre-calculates and stores the relationship between optical conditions and configuration conditions in a database before actual matching operations. This preliminary preparation allows the system to quickly retrieve and compare pre-computed data during matching, avoiding time-consuming real-time calculations while maintaining high precision.
Solution Approach 2:
The patent introduces a database as an intermediary that stores the complex relationship between optical conditions and configuration conditions. This database acts as a mediator between the measurement system and the adjustment system, enabling fast lookup and comparison without requiring direct real-time computation or manual iteration through all parameter combinations.
2Productivity
If multiple optical conditions are handled simultaneously, then productivity is improved, but operator knowledge requirements and complexity increase
Solution Approach 1:
The patent enables the system to automatically perform matching operations by querying the database with measured values and automatically determining the optimal optical conditions. This self-service capability eliminates the need for operators to manually handle multiple optical conditions simultaneously, reducing the complexity burden on operators while maintaining high productivity.
Solution Approach 2:
The patent replaces the manual mechanical adjustment process with an automated information processing system. Instead of operators physically adjusting multiple optical conditions based on experience and knowledge, the system uses database queries and automated calculations to determine optimal settings, substituting human cognitive processes with computational processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device can efficiently obtain optimal parameters in a short time, reducing the time required for matching operations and improving measurement reproducibility and throughput.
Implementation Method 1
an electron gun that irradiates a sample with an electron beam
Data Source
AI summary
The present invention provides a charged particle beam device with which optimal parameters for the device can be effectively derived in a short time period. This charged particle beam device comprises: an electron gun (1) that irradiates a sample (10) with an electron beam (2); an image processing unit (901) that acquires an image of the sample (10) from a signal (12) generated by the sample (10) due to the electron beam (2); a database (604) that holds correspondence between a first parameter that is an optical condition, a second parameter that is a value pertaining to device performance, and a third parameter that is information pertaining to the device configuration, and stores a plurality of analysis values and measurement values; and a learning machine (605) that searches the database (604) and derives a first parameter that satisfies a target value of the second parameter.