Charged Particle Beam Practice Function for Focus Adjustment
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Solution Overview
Problem
Charged particle beam apparatuses, such as scanning electron microscopes, require skilled professionals for manual adjustments due to the complexity of adjusting multiple parameters, making it difficult for beginners to achieve optimal image quality.
Innovation Solution
A practice function is integrated into the charged particle beam apparatus that allows users to practice focus and stigma adjustments through a user-friendly interface, displaying practice-purpose images based on set parameters, enabling real-time feedback and evaluation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If automatic adjustment function is implemented, then adjustment ease is improved, but reliability deteriorates for highly versatile apparatus with wide range of observation samples
Solution Approach 1:
The patent creates a virtual copy of the observation environment through simulation images that reproduce various sample conditions and adjustment states. Users can practice adjustments on these simulated images without affecting actual observations, allowing skill development without compromising real measurement reliability
Solution Approach 2:
The system prepares multiple pre-calculated simulation images representing different adjustment states and sample types in advance. Users can familiarize themselves with adjustment procedures and effects before actual observations, improving both ease of operation and reliability when performing real adjustments
2Measurement precision
If manual adjustment technology is learned through repeated operation experiences, then adjustment skill is improved, but loss of time increases for beginners
Solution Approach 1:
Virtual simulation images replicate real observation conditions, allowing users to practice adjustments repeatedly without time loss. The simulation environment provides immediate visual feedback on adjustment effects, accelerating skill acquisition compared to traditional trial-and-error learning on actual samples
Solution Approach 2:
Users can perform preliminary practice adjustments on simulation images before actual observations. The system stores multiple simulation images representing different adjustment states, enabling users to understand adjustment effects in advance and reduce learning time for real operations
3Manufacturing precision
If three parameters are adjusted simultaneously for focus and stigma adjustment, then image quality is improved, but device complexity increases
Solution Approach 1:
The patent segments the adjustment learning process into manageable parts by providing simulation images that isolate specific adjustment effects. Users can practice adjusting individual parameters (focus, X-stigma, Y-stigma) independently through targeted simulation exercises, reducing the perceived complexity while maintaining the ability to achieve high image quality
Solution Approach 2:
Simulation images replicate the visual effects of parameter adjustments without requiring actual physical adjustments. This virtual copying allows users to understand the relationship between parameter changes and image quality improvements without being overwhelmed by the complexity of simultaneous three-parameter adjustment
Data Source
AI summary
A charged particle beam apparatus is provided with a parameter adjustment practice function for allowing any user to easily learn manual focus adjustment and stigma adjustment. Control conditions of the focus arrangement of an objective lens, an X-stigmator and a Y-stigmator are set according to the user's operation. According to a group of the focus adjustment, an X-stigma adjustment and a Y-stigma adjustment which are set, a practice-purpose image corresponding to the control conditions is read out from a storage device and is displayed on a screen.