Charged Particle Beam Proxy Electrode for 3D Structure Inspection
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Solution Overview
Problem
Charged particle beam devices face challenges in imaging and inspecting 3D structures with high aspect ratios due to difficulties in detecting secondary electrons, which cannot escape and are undetected with a reasonable signal-to-noise ratio, and the use of backscattered electrons impacts primary beam performance, reducing resolution.
Innovation Solution
A charged particle beam device with a retarding field device comprising a magnetic-electrostatic objective lens and a proxy electrode that allows the primary beam to pass through a first opening and off-axial backscattered particles to pass through a second opening, enabling efficient detection of backscattered particles without compromising primary beam performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If backscattered electron detection is used to improve imaging quality of 3D structures, then image quality is improved, but primary beam performance deteriorates
Solution Approach 1:
The proxy electrode is segmented with multiple openings (first opening for primary beam, second opening for backscattered particles) to spatially separate the paths of primary electrons and backscattered electrons, allowing simultaneous detection without interference
Solution Approach 2:
The proxy electrode extracts backscattered electrons from the main electron beam path by providing a dedicated second opening that allows backscattered particles to pass through separately from the primary beam, enabling independent detection
2Manufacturing precision
If secondary electron detection is used for imaging, then spatial resolution is improved, but detection capability deteriorates for high aspect ratio structures
Solution Approach 1:
The proxy electrode acts as an intermediary component between the sample and detectors, modifying the electron trajectories by providing specific opening configurations that facilitate the extraction and detection of electrons from high aspect ratio structures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for effective imaging and inspection of 3D structures with high aspect ratios by enhancing the detection of backscattered particles, improving image quality and inspection results without negatively affecting the primary beam's resolution or spot size.
Implementation Method 1
a magnetic-electrostatic objective lens
Implementation Method 2
a magnetic-electrostatic objective lens
Implementation Method 3
allowing the passage of off-axial backscattered particles
Data Source
AI summary
A charged particle beam device for imaging and/or inspecting a sample is described. The charged particle beam device includes a beam emitter for emitting a primary charged particle beam; and a retarding field device for retarding the primary beam before impinging on the sample, the retarding field device including a magnetic-electrostatic objective lens and a proxy electrode. The charged particle beam device is adapted for guiding the primary beam along an optical axis to the sample for generating secondary particles released from the sample and backscattered particles. The proxy electrode comprises a first opening allowing the passage of the primary beam and at least one second opening for allowing the passage of off-axial backscattered particles. Further, a proxy electrode and a method for imaging and/or inspecting a sample by a charged particle beam are described.