Charged Particle Beam Specimen Transport Temperature Control

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Solution Overview

Problem

In charged particle beam apparatuses, temperature differences between the transporting mechanism and the specimen holder can cause misalignment, leading to rubbing and potential damage, scattering of metal particles, and improper specimen transport.

Innovation Solution

Incorporating temperature sensors to measure the temperatures of both the transporting mechanism and the specimen holder, and a control unit that calculates the temperature difference and stops specimen transportation if it exceeds a threshold, preventing misalignment and subsequent damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If specimen transport is performed without temperature control, then transport speed and productivity are improved, but misalignment and damage occur due to thermal contraction

Engineering Contradiction:

Improvespecimen transport speedVSAvoidalignment accuracy

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The patent applies parameter changes by monitoring temperature differences between the transporting mechanism and specimen holder, and adjusting the transport operation based on thermal conditions. When temperature difference exceeds a threshold, the transport is stopped or delayed, allowing thermal equilibrium to be reached, thus preventing misalignment while maintaining efficient transport when conditions are favorable.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent implements feedback control by using temperature sensors to continuously monitor the thermal state of the transporting mechanism and specimen holder, comparing the temperature difference against a predetermined threshold, and automatically controlling the transport operation accordingly. This closed-loop feedback system prevents misalignment without requiring manual intervention.

Inventive Principle:

Principle #23Feedback

2Reliability

If temperature monitoring and control are added, then alignment accuracy and reliability are improved, but device complexity increases

Engineering Contradiction:

Improvealignment accuracyVSAvoidsystem structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical alignment adjustment mechanisms with a simpler thermal monitoring and control system. Instead of using精密 mechanical adjustment devices to compensate for thermal contraction, the system uses temperature sensors and control logic to prevent transport when temperature differences would cause misalignment, thereby achieving high reliability with reduced mechanical complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If transport is stopped due to temperature difference, then misalignment and damage are prevented, but transport time increases

Engineering Contradiction:

Improvespecimen holder protectionVSAvoidspecimen transport time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent applies partial action by implementing temperature-based transport control only when necessary - specifically when the temperature difference exceeds a predetermined threshold. When temperature conditions are favorable, transport proceeds without delay, maintaining high productivity. The protective action is activated only to the extent needed to prevent misalignment, avoiding unnecessary delays in normal operating conditions.

Inventive Principle:

Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents misalignment and damage by stopping specimen transport when a temperature difference exceeds a threshold, ensuring accurate and safe handling of specimens in charged particle beam apparatuses.

Implementation Method 1

a first temperature sensor that measures a temperature of the specimen holder

Methodology Applied

Scientific EffectTemperature sensing: Thermistor

Implementation Method 2

a second temperature sensor that measures a temperature of the transporting mechanism

Methodology Applied

Scientific EffectTemperature sensing: Thermistor

Implementation Method 3

calculating a temperature difference between the specimen holder and the transporting mechanism based on information on the temperature of the specimen holder measured by the first temperature sensor and information on the temperature of the transporting mechanism measured by the second temperature sensor

Methodology Applied

Scientific EffectTemperature differential measurement: Temperature Gradient

Data Source

PatentUS11651936B2Charged particle beam apparatus

Publication Date: 2023.05.16 JEOL LTD

AI summary

A charged particle beam apparatus includes: a specimen chamber; a specimen holder that is disposed in the specimen chamber; a specimen exchange chamber that is connected to the specimen chamber; a transporting mechanism that transports a specimen between the specimen chamber and the specimen exchange chamber; a first temperature sensor that measures a temperature of the specimen holder; a second temperature sensor that measures a temperature of the transporting mechanism; and a control unit. The control unit: calculates a temperature difference between the specimen holder and the transporting mechanism based on the temperature of the specimen holder and the temperature of the transporting mechanism when the control unit has received an instruction to transport a specimen; determining whether the temperature difference is a threshold or more; and stopping transportation of a specimen when the control unit has determined that the temperature difference is the threshold or more.