Charged Particle Beam Apparatus Vibration Control
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Solution Overview
Problem
Current charged particle beam writing apparatuses face challenges in accurately correcting variations in the relative position between the charged particle beam and the sample due to vibrations, which cannot be fully addressed by existing tracking correction methods, especially when mechanical failures occur in the laser length measurement system, leading to errors in pattern writing and requiring extensive time for evaluation.
Innovation Solution
The apparatus incorporates a controller with actuators to provide frequency vibrations to the stage, optical column, and chamber, along with a detection system using a mark and electron detector to analyze vibrations and identify mechanical failures, allowing for rapid evaluation of relative position variations without actual pattern writing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If tracking correction is used to correct irradiation position, then writing precision is improved, but measurement precision deteriorates when mechanical failures occur in the laser length measurement system
Solution Approach 1:
The patent creates a virtual model (copy) of the charged particle beam apparatus that includes vibration characteristics. Instead of relying on the actual laser length measurement system which may have mechanical failures, the invention uses this virtual model to simulate and predict beam position variations caused by vibrations, thereby bypassing the need for potentially faulty physical measurement systems while maintaining writing precision.
Solution Approach 2:
The patent replaces the mechanical laser length measurement system with a computational approach using a virtual model. The virtual model calculates beam position variations based on vibration characteristics and apparatus parameters, substituting the mechanical measurement system with an information-based system that is not susceptible to mechanical failures.
2Measurement precision
If actual pattern writing is performed to evaluate relative position variation, then measurement accuracy is improved, but productivity deteriorates due to extensive time required
Solution Approach 1:
The patent performs preliminary actions by creating a virtual model of the charged particle beam apparatus that incorporates vibration characteristics before actual pattern writing. This virtual model allows for pre-evaluation of relative position variations and prediction of writing precision, enabling operators to identify and correct potential issues before consuming materials and time on actual pattern writing.
Solution Approach 2:
The invention uses a virtual model (copy) of the actual apparatus to perform evaluations. Instead of writing actual patterns on expensive substrates and waiting for development to evaluate performance, the virtual model simulates the writing process and predicts outcomes, providing rapid evaluation without consuming physical resources or extensive time.
3Ease of operation
If laser length measurement system is used for tracking correction, then position correction capability is improved, but reliability deteriorates due to mechanical failures
Solution Approach 1:
The patent replaces the mechanical laser length measurement system with an information-based virtual model that calculates beam position based on vibration characteristics and apparatus parameters. This substitution eliminates the mechanical components prone to failure (laser light source, mirror, light receiver) while maintaining the position correction capability through computational methods.
Solution Approach 2:
The virtual model acts as an intermediary between the physical apparatus and the control system. Instead of directly measuring beam position with a mechanical laser system, the virtual model mediates by calculating expected position variations based on vibration data and apparatus characteristics, providing a reliable interface that is not subject to mechanical failures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the detection of mechanical failures and suppression of vibrations, facilitating quick identification and maintenance of the apparatus, reducing the time needed for pattern writing and evaluation, and improving the precision of charged particle beam positioning.
Implementation Method 1
a charged particle detector configured to detect a position of the charged particle beam irradiated from the electronic optical system
Implementation Method 2
a first actuator configured to provide a frequency vibration to the stage based on a first excitation signal; a second actuator configured to provide a frequency vibration to the optical column based on a second excitation signal; a third actuator configured to provide a frequency vibration to the chamber based on a third excitation signal
Data Source
AI summary
According to an embodiment, a charged particle beam apparatus includes a stage; a chamber; an emission source of the charged particle beam; an electronic optical system configured to emit the charged particle beam; an optical column including the emission source and the electronic optical system; a charged particle detector configured to detect a position of the charged particle beam; a first actuator configured to provide a frequency vibration to the stage based on a first excitation signal; a second actuator configured to provide a frequency vibration to the optical column based on a second excitation signal; a third actuator configured to provide a frequency vibration to the chamber based on a third excitation signal; and a controller configured to generate the first to third excitation signals.