Multi Charged Particle Beam Writing Region Division for Throughput
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Solution Overview
Problem
In multi charged particle beam writing apparatuses, redundancy in bitmap data generation between computing machines leads to increased processing data volume due to overlapping calculation regions, hindering throughput improvement.
Innovation Solution
The writing region is virtually divided into blocks and meshes, with a cell data allocator allocating figures to blocks considering correction data for substrate bending, and bitmap data generators calculating irradiation amounts per mesh region, reducing overlap and redundant processing by dividing regions in a direction different from the writing forward direction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If bitmap data generation regions are expanded to cover substrate bending correction, then writing position accuracy is improved, but redundant processing between computing machines increases
Solution Approach 1:
The writing region is divided into multiple blocks, and each block is further divided into meshes. Bitmap data generation is segmented across multiple computing machines, with each machine responsible for specific blocks. This segmentation allows parallel processing while managing overlap regions systematically.
Solution Approach 2:
The patent introduces a hierarchical structure with blocks and meshes as intermediate dimensions between the writing region and individual beams. This multi-dimensional organization enables efficient distribution of calculation tasks across computing machines while minimizing redundant processing through proper region allocation.
2Reliability
If multiple computing machines process overlapping regions, then substrate bending correction is improved, but processing data volume increases
Solution Approach 1:
Different computing machines are assigned to process different blocks with controlled overlap. The overlap regions are localized and managed systematically, allowing each machine to focus on specific regions while maintaining correction accuracy. This local quality approach ensures that redundancy is minimized while preserving the necessary overlap for accurate substrate bending correction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces redundant processing data volume and improves throughput by minimizing overlap between bitmap data generation regions, enhancing the efficiency of data processing and transfer in multi charged particle beam writing.
Implementation Method 1
a charged particle beam to pass through a shaping aperture array, thereby forming multi beams
Implementation Method 2
Each of the blankers performs blanking deflection on passing charged particle beams. A charged particle beam deflected by a blanker is blocked, and a charged particle beam not deflected by a blanker is emitted on a specimen
Data Source
AI summary
In one embodiment, a first storage storing writing data, a second storage storing correction data for correcting an error in a writing position due to factors including bending of the substrate, a cell data allocator virtually dividing a writing region of the substrate into blocks, and allocating a cell to the blocks in consideration of the correction data, a plurality of bitmap data generators virtually dividing the blocks into meshes, calculating an irradiation amount per mesh region, and generating bitmap data which assigns the irradiation amount to each mesh region, and a shot data generator generating shot data that defines an irradiation time for each beam. The cell data allocator virtually divides the writing region by division lines in a direction different from a writing forward direction to generate a plurality of division regions. The plurality of bitmap data generators generate pieces of bitmap data of the different division regions.