Bearing Device Light Reflection Compensating Block
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Solution Overview
Problem
In the manufacturing of display devices, exposure processes result in varying exposure rates of photoresist at different positions on a substrate, leading to defective products due to differences in reflectivity ratios between the bearing platform, lifting structure, and light reflection compensating block.
Innovation Solution
A bearing device with a light reflection compensating block positioned between the lifting structure and the inner wall of the lifting passage, where the reflectivity ratios of the top surface of the block, bearing platform, and lifting structure are equalized, ensuring uniform exposure across the substrate by minimizing differences in reflected light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a lifting structure is introduced to lift the substrate after exposure, then the substrate can be easily removed from the bearing platform, but the difference in reflectivity ratios between the lifting structure and the bearing platform causes non-uniform exposure of photoresist at different positions
Solution Approach 1:
The inner wall of the lifting passage is equipped with a light-reflecting structure that has different reflectivity characteristics compared to other areas. This local quality adjustment ensures that the reflected light from the lifting passage inner wall compensates for the shadow effect, maintaining uniform exposure across the substrate while preserving the lifting function.
Solution Approach 2:
The light-reflecting structure on the inner wall of the lifting passage预先 compensates for the shadow effect that would be caused by the lifting structure blocking light. By reflecting additional light into the lifting passage area, it counteracts the potential under-exposure before it occurs, ensuring uniform exposure across the entire substrate.
2Manufacturing precision
If the lifting passage inner wall is made highly reflective to compensate for shadow effects, then exposure uniformity improves, but the complexity of the device increases due to additional light-reflecting structures
Solution Approach 1:
The inner wall of the lifting passage serves dual functions: it provides the structural boundary for the lifting mechanism and simultaneously acts as a light-reflecting surface through the integrated light-reflecting structure. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity while achieving improved exposure uniformity.
3Ease of operation
If the lifting structure is positioned centrally to optimize substrate handling, then ease of operation improves, but the shadow effect on photoresist exposure increases due to the blocking of light paths
Solution Approach 1:
The light-reflecting structure on the inner wall of the lifting passage acts as an intermediary that redirects light into the shadowed lifting passage area. It mediates between the central lifting structure (which blocks light) and the photoresist (which needs uniform exposure), reflecting light from surrounding areas into the shadow zone to achieve uniform illumination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution achieves uniform exposure of photoresist across the substrate, improving the quality of components and product yield by ensuring consistent light reflection from the bearing platform, light reflection compensating block, and lifting structure.
Implementation Method 1
a light reflection compensating block between the lifting structure and an inner wall of the lifting passage
Data Source
AI summary
The present disclosure provides a bearing device. The bearing device includes a bearing platform, a lifting passage extending through the bearing platform, a lifting structure in the lifting passage and a light reflection compensating block between the lifting structure and an inner wall of the lifting passage. A difference between a reflectivity ratio of a top surface of the light reflection compensating block and a reflectivity ratio of a bearing surface of the bearing platform is less than or equal to a threshold value. A difference between the reflectivity ratio of the top surface of the light reflection compensating block and a reflectivity ratio of a top surface of the lifting structure is less than or equal to the threshold value. The present disclosure further provides an exposure apparatus including the bearing device.