Bernoulli Gripper With Segmented Plate For Thin Wafers

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Solution Overview

Problem

Existing gripping devices for thin objects, such as silicon wafers, are not adequately designed for confined spaces and are costly to manufacture, with a need for a device that can simultaneously handle multiple objects while being thin enough to navigate between stacked plates and having a simple, cost-effective manufacturing method.

Innovation Solution

A gripping device comprising a thin support with air ejection nozzles and tubes, where the support is a single piece with specific openings and a connecting bar, allowing for simultaneous manipulation of multiple objects using compressed air to create a Bernoulli effect for gripping, and featuring a simple machining process to reduce costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If a traditional gripping device is used to handle thin objects, then the gripping function is achieved, but the device thickness is too large to operate in confined spaces between stacked plates

Engineering Contradiction:
Improvegripper thicknessVSAvoidgripping stability
Core Design Contradiction:
Length of moving objectVSReliability

Solution Approach 1:

The support plate is segmented with multiple openings (first openings from one face, second openings from the opposite face) that allow the structure to be thin while maintaining structural integrity and enabling air flow paths for the Bernoulli effect to function effectively

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses compressed air through nozzles to create the Bernoulli effect, which generates suction force for gripping. This pneumatic system enables effective gripping with a thin profile, as the air pressure differential creates sufficient holding force without requiring a thick mechanical structure

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Productivity

If multiple nozzles and tubes are added to handle multiple objects simultaneously, then productivity increases, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improvenumber of objects handled simultaneouslyVSAvoidnumber of components
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Multiple nozzles are integrated into a single support plate structure with shared openings and air supply pathways. The first and second openings on opposite faces of the plate work together as a unified system, reducing the need for separate component assemblies and simplifying manufacturing while enabling simultaneous handling of multiple objects

Inventive Principle:
Principle #5Merging (Combining)

3Adaptability or versatility

If multiple separate components are used to achieve the gripping function, then adaptability is improved, but manufacturing cost and assembly complexity increase

Engineering Contradiction:
Improveconfigurability of gripperVSAvoidmanufacturing simplicity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The support plate serves multiple functions simultaneously: it provides structural support, contains the air supply pathways through its openings, houses the nozzle assemblies, and creates the Bernoulli effect chamber. This multi-functional design reduces the need for separate components while maintaining adaptability for handling different thin objects

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device effectively grips and moves multiple thin objects, like silicon wafers, in confined spaces with reduced manufacturing costs and vibrations, enhancing operational efficiency and cost-effectiveness.

Implementation Method 1

The flow of air creates by Bernoulli effect a depression resulting in the maintenance of the object against the gripping device

Methodology Applied
Scientific EffectBernoulli effect: Bernoulli Effect

Data Source

PatentEP3774207B1Grip device
Publication Date: 2023.06.07 ECM GREENTECH
  • EP3774207B1 patent drawingFigure 1
  • EP3774207B1 patent drawingFigure 2
  • EP3774207B1 patent drawingFigure 3

AI summary

The invention relates to a device for gripping at least one object, said device comprising a gripper (20) for coming into contact with the object. The gripper comprises a support (24) comprising a plate (42) having first and second opposing faces (60, 62) comprising first openings (84) extending into the plate from the first face (60) only over part of the thickness of the plate, and second openings (82) extending into the plate from the second face (60), only over part of the thickness of the plate, each first opening communicating with at least one of the second openings; at least one air ejection nozzle (26) with a Bernoulli effect fixed to the support; and at least one tube (28) connected to the nozzle and arranged in the first and second openings.