Bi-spectral Infrared Detector Meta-surface Pixel Segmentation

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Solution Overview

Problem

Current bi-spectral IR detectors face challenges in achieving spatial coherence between MWIR and LWIR images due to poor optical coupling and complex contact structures, leading to low sensitivity and resolution.

Innovation Solution

A bi-spectral detector with a meta-surface configuration that focuses different infrared wavelengths on separate pixels, using a stack of semiconductor layers and dielectric resonators to enhance optical coupling and reduce crosstalk, allowing for improved sensitivity and resolution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a Bayer matrix with interference filters is used to detect MWIR and LWIR images, then the detector can capture both spectral bands, but the spatial coherence between the two images is lost and the sensitivity and resolution are low

Engineering Contradiction:
Improvedetection of multiple spectral bandsVSAvoidspatial coherence and resolution
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The detector is segmented into distinct pixel regions: first pixels for MWIR detection and second pixels for LWIR detection. This segmentation allows each pixel type to be optimized for its specific spectral band while maintaining spatial coherence within each band, resolving the contradiction between multi-band detection capability and spatial coherence.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If two superposed absorbing layers (QWIP technology) are used to maintain spatial coherence, then spatial coherence is achieved, but the optical coupling is poor and the device complexity increases due to multiple contacts

Engineering Contradiction:
Improvespatial coherenceVSAvoidcontact structure and optical coupling
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the optical coupling function from the complex multi-layer QWIP structure and implements it through a simplified single-substrate architecture with selective pixel regions. This extraction eliminates the need for complex inter-layer optical coupling and multiple contact structures, reducing device complexity while preserving spatial coherence.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of using vertical superposition of absorbing layers (three-dimensional stacking requiring multiple contacts), the patent transitions to a planar two-dimensional arrangement where first and second pixels are distributed on the same substrate plane. This dimensional change simplifies the contact structure to a single plane while maintaining spatial coherence through proper pixel positioning.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If a mesa structure with air contact is used for QWIP detectors, then the pixel structure is simplified, but dark current increases and passivation becomes problematic

Engineering Contradiction:
Improvepixel structure fabricationVSAvoiddark current
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The patent applies homogeneous passivation material covering all pixel surfaces uniformly, including the mesa structures. This homogeneous passivation approach simplifies the manufacturing process compared to selective passivation while effectively reducing dark current generated at air-contact interfaces, resolving the contradiction between manufacturing ease and dark current reduction.

Inventive Principle:
Principle #33Homogeneity

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves better spatial coherence and sensitivity by focusing MWIR and LWIR beams on distinct pixels, improving the Modulation Transfer Function (MTF) and gain, while simplifying the detector's manufacturing process.

Implementation Method 1

a plurality of dielectric resonators on the upper face of said substrate forming an upper surface called meta-surface, the meta-surface being configured to diffuse, deflect and focus in the pixels of the detector in a resonant manner

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

the meta-surface being configured to diffuse, deflect and focus in the pixels of the detector in a resonant manner, when illuminated by the incident light

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 3

an absorbent structure arranged on an underside of a substrate and comprising a stack of at least one absorbent layer of semiconductor material, sensitive in the two spectral bands and able to photo-generate carriers by absorption of an incident beam on an upper face of said substrate

Methodology Applied
Scientific EffectPhoto-generation: Photoelectric Effect

Implementation Method 4

able to photo-generate carriers by absorption of an incident beam

Methodology Applied
Scientific EffectAbsorption: Absorption (EM radiation)

Data Source

PatentEP3818566B1Improved bi-spectral detector
Publication Date: 2022.06.15 THALES SA
  • EP3818566B1 patent drawingFigure 1
  • EP3818566B1 patent drawingFigure 2
  • EP3818566B1 patent drawingFigure 3a~3b

AI summary

The invention relates to an optical detector (10) that is sensitive in at least two infrared wavelength ranges denoted first spectral band (SB1) and second spectral band (SB2), and having a set of pixels, comprising: - an absorbent structure (Sabs) disposed on a lower face (11) of a substrate (Sub) and comprising a stack of at least one absorbent layer (AL, AL1, AL2) made of semi-conductor material; - the detector further comprising a plurality of dielectric resonators (Res) on the upper surface (12) of said substrate forming an upper surface denoted metasurface (13), the metasurface being configured to diffuse, deflect and focus in the pixels of the detector in a resonant manner, when illuminated by the incident light (IL), a first beam (FL1) having at least one first wavelength (A1) included in the first spectral band (SB1) and a second beam (FL2) having at least one second wavelength (A2) included in the second band, the metasurface also being configured so that said first (FL1) and second (FL2) beams are focused on different pixels of the detector.