BiSb (012) TI Layers With Ceramic Doping for High-Temperature SOT MRAM

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Solution Overview

Problem

There is a need for improved process temperatures and reduced antimony migration in low melting point topological insulators like BiSbX alloys with high spin Hall angles and conductivity, particularly for spin-orbit torque (SOT) magnetic tunnel junction (MTJ) devices.

Innovation Solution

The introduction of dopants or clusters of highly cohesive carbide, nitride, or oxide ceramic materials in the BiSb lamellae layers with a (012) crystal orientation, which form a grain boundary glass at less than 400°C, allowing SOT MTJ devices to operate at higher temperatures while inhibiting Sb migration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If BiSbX alloys with high spin Hall angles and conductivity are used, then device performance is improved, but operating temperature is limited due to low melting point

Engineering Contradiction:
Improvedevice performanceVSAvoidoperating temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent employs composite material structures including BiSbX alloy layers combined with buffer layers, interlayers, and capping layers. Each layer is carefully selected to provide specific functions while maintaining overall device performance. The composite structure allows the low melting point BiSbX to operate at higher temperatures by providing thermal stability through the surrounding layers with higher melting points.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent modifies the composition parameters of the BiSbX alloy by adjusting the ratios of Bi, Sb, and X elements to optimize the balance between melting point and spin Hall angle. By changing the compositional parameters, the device achieves improved thermal stability while maintaining high spin Hall effect for spin-orbit torque functionality.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If BiSb layers with (012) orientation are used, then spin Hall angle and conductivity are improved, but antimony migration occurs at elevated temperatures

Engineering Contradiction:
Improvespin Hall angleVSAvoidantimony migration
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent introduces buffer layers, interlayers, and capping layers as intermediary structures between the BiSbX alloy layers. These intermediary layers act as diffusion barriers that prevent antimony migration while allowing the BiSbX layers to maintain their desired (012) crystal orientation and high spin Hall angle. The interlayers serve as mediators that isolate the BiSbX from direct interaction with adjacent layers, preventing compositional degradation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies preliminary protective measures by depositing buffer and capping layers before and after forming the BiSbX alloy layers. These layers are designed to preemptively prevent antimony migration before it can occur during device operation or fabrication processes. The preliminary anti-action is embodied in the careful selection and positioning of these protective layers to block diffusion pathways.

Inventive Principle:
Principle #9Preliminary anti-action

3Ease of manufacture

If processing temperature is increased, then device fabrication is improved, but antimony migration increases in low melting point BiSbX alloys

Engineering Contradiction:
Improvefabrication processVSAvoidantimony migration
Core Design Contradiction:
Ease of manufactureVSLoss of substance

Solution Approach 1:

The buffer layers, interlayers, and capping layers serve as intermediary structures that enable higher processing temperatures during fabrication. These layers act as thermal and diffusion barriers that protect the BiSbX alloy from antimony migration even when elevated temperatures are used for fabricating other device components. The intermediaries allow decoupling of fabrication temperature requirements from material stability constraints.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables SOT MTJ devices to operate at higher temperatures while preventing Sb migration, enhancing the stability and performance of BiSb layers with a (012) orientation, thereby improving the spin Hall angle and conductivity for applications in MRAM and MAMR devices.

Implementation Method 1

form a grain boundary glass at less than 400°C

Methodology Applied
Scientific EffectGlass formation: Vitrification

Implementation Method 2

BiSb with a (012) crystallographic orientation has a high spin Hall angle and high conductivity

Methodology Applied
Scientific EffectSpin Hall effect: Hall Effect

Data Source

PatentUS11908496B2BiSbX (012) layers having increased operating temperatures for SOT and MRAM devices
Publication Date: 2024.02.20 WESTERN DIGITAL TECHNOLOGIES INC
  • US11908496B2 patent drawing
  • US11908496B2 patent drawing
  • US11908496B2 patent drawing

AI summary

The present disclosure generally relate to spin-orbit torque (SOT) devices comprising a topological insulator (TI) modulation layer. The TI modulation layer comprises a plurality of bismuth or bismuth-rich composition modulation layers, a plurality of TI lamellae layers comprising BiSb having a (012) crystal orientation, and a plurality of texturing layers. The TI lamellae layers comprise dopants or clusters of atoms, the clusters of atoms comprising a carbide, a nitride, an oxide, or a composite ceramic material. The clusters of atoms are configured to have a grain boundary glass forming temperature of less than about 400° C. Doping the TI lamellae layers comprising BiSb having a (012) crystal orientation with clusters of atoms comprising a carbide, a nitride, an oxide, or a composite ceramic material enable the SOT MTJ device to operate at higher temperatures while inhibiting migration of Sb from the BiSb of the TI lamellae layers.