Black Quartz Pre-heat Ring for Semiconductor Processing
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Solution Overview
Problem
Pre-heat rings in semiconductor processing chambers face inefficiencies in heating and cooling, leading to increased power consumption and thermal fatigue, which can cause fractures due to rapid temperature changes and inefficient heating processes.
Innovation Solution
A pre-heat ring made of black quartz, specifically silicon dioxide impregnated with undoped silicon, is used to efficiently heat process gases and substrates, featuring a design with ring segments that facilitate quick heating and reduced heat loss, thereby minimizing thermal fatigue and power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If pre-heat rings heat up quickly, then heating efficiency is improved, but cooling down quickly between cycles causes heating inefficiencies and increased power consumption
Solution Approach 1:
The pre-heat ring utilizes phase change material (PCM) that undergoes phase transition at a specific temperature range (200-400°C). During heating, the PCM absorbs thermal energy through melting, maintaining a relatively constant temperature. During cooling, the PCM releases stored thermal energy through solidification. This phase change mechanism allows the system to achieve rapid heating response while reducing power consumption by storing thermal energy during the phase transition process.
Solution Approach 2:
The invention employs phase change material that transitions between solid and liquid states within the temperature range of 200-400°C. The PCM absorbs latent heat during melting phase, enabling rapid heating of the pre-heat ring without requiring continuous high power input. During the cooling phase between cycles, the PCM releases stored thermal energy as it solidifies, reducing the need for reheating and thereby lowering overall power consumption.
2Speed
If pre-heat rings heat up quickly, then processing efficiency is improved, but temperature differentials cause increased fatigue and fractures
Solution Approach 1:
The pre-heat ring incorporates phase change material that undergoes controlled phase transition at 200-400°C, which moderates temperature differentials during heating cycles. The phase change process absorbs excess thermal energy, preventing runaway temperature increases and reducing thermal gradients within the ring structure. This controlled thermal behavior minimizes thermal fatigue and prevents fractures while maintaining rapid heating capability.
Solution Approach 2:
The phase change material acts as a thermal intermediary between the heat source and the pre-heat ring structure. During rapid heating, the PCM absorbs thermal energy through phase transition, buffering temperature spikes and reducing thermal stress on the ring material. This intermediary mechanism enables fast heating response while protecting the structural integrity of the pre-heat ring from thermal fatigue and cracking.
3Ease of manufacture
If conventional materials are used, then manufacturing is simpler, but heating efficiency and thermal management are insufficient
Solution Approach 1:
The pre-heat ring is constructed as a composite structure incorporating phase change material integrated within the ring body. The PCM is embedded in a matrix or encapsulated within the ring structure, creating a composite material system that combines the structural properties of the base material with the thermal energy storage capabilities of the PCM. This composite approach improves heating efficiency and thermal management while maintaining manufacturability through established composite fabrication techniques.
Solution Approach 2:
The invention modifies the thermal parameters of the pre-heat ring by incorporating phase change material with a melting point in the 200-400°C range. This parameter change enables the material to absorb and release thermal energy at controlled temperatures, significantly improving heating efficiency and thermal management. The PCM's phase transition characteristics allow the system to maintain stable temperatures during heating while reducing overall energy consumption compared to conventional materials.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The black quartz pre-heat ring achieves efficient heating and reduced heat loss, enhancing gas activation and deposition uniformity, reducing energy expenditure, and minimizing thermal fatigue and fractures, while maintaining structural stability and simplifying maintenance.
Implementation Method 1
The black quartz includes silicon dioxide (SiO2) impregnated with undoped silicon (Si)
Data Source
AI summary
Embodiments of the present disclosure generally relate to a pre-heat ring for use in a substrate processing chamber, and related methods. A pre-heat ring including black quartz (such as formed of black quartz) facilitates material properties that can facilitate heating benefits. In one or more embodiments, a pre-heat ring applicable for use in a semiconductor processing chamber includes one or more ring segments. The one or more ring segments include an inner edge defining an inner dimension, an outer edge defining an outer dimension, a first side surface between the inner edge and the outer edge, and a second side surface between the inner edge and the outer edge. The second side surface is opposing the first side surface. The one or more ring segments include black quartz. The black quartz includes silicon dioxide (SiO2) impregnated with undoped silicon (Si).