Multi-Charged Particle Beam Blanking Device Heat Management
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing blanking systems for multi-charged particle beams face challenges in high-speed operation due to increased heating values and data transmission time as the number of beams and shift registers increases, limited by heat exhaust efficiency and pad arrangement constraints in a vacuum region.
Innovation Solution
A blanking device with shift registers arranged in two dimensions, grouped into subgroups connected in parallel, reduces the number of clock operations required and allows for high-speed operation by optimizing the arrangement of shift registers and data transmitters, thereby reducing heating values and improving data transmission efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of beams increases to increase throughput, then productivity is improved, but the heating value of the blanking plate increases and heat exhaust efficiency becomes insufficient
Solution Approach 1:
The blanking plate is divided into a plurality of regions, with each region containing a subset of beams and corresponding shift registers. This segmentation distributes the heat generation across multiple isolated regions, preventing heat accumulation in a single location and improving overall heat exhaust efficiency while maintaining high beam counts for increased throughput.
Solution Approach 2:
Shift registers are arranged in a two-dimensional matrix configuration rather than a single linear row. This two-dimensional arrangement distributes the shift registers across multiple rows and columns, spreading out the heat generation in both spatial dimensions and improving heat dissipation capability while accommodating a larger number of beams.
2Quantity of substance
If the number of shift registers arranged in one row increases to support more beams, then the number of beams is increased, but the number of clock operations per unit time increases and data transmission time increases
Solution Approach 1:
The shift registers are divided into multiple rows, with each row containing a manageable number of shift registers. Data can be transmitted to each row independently and in parallel, reducing the total data transmission time compared to transmitting sequentially through a single long row of shift registers.
Solution Approach 2:
The shift registers are arranged in a two-dimensional matrix with multiple rows and columns. This allows data transmission to occur across multiple rows simultaneously, effectively parallelizing the data transmission process and reducing the overall time required to initialize all shift registers for a given beam configuration.
3Quantity of substance
If the number of pads is increased to support more rows of blankers, then the number of beams can be increased, but the chip size limit makes it difficult to arrange pads
Solution Approach 1:
The blanking plate is segmented into multiple regions, each region corresponding to a subset of beams and requiring a corresponding subset of pads. This segmentation allows the total number of pads to be distributed across the chip surface in a manageable manner, fitting within the 20mm chip size limit while still supporting a large total number of beams through the two-dimensional arrangement.
Data Source
AI summary
A blanking device for multi-charged particle beams includes plural shift registers arranged in two dimensions, and plural data transmitters each configured to be arranged, where each of first shift register groups is aligned in the same row or column, in the plural shift registers arranged in two dimensions, the plural data transmitters each arranged for each of second shift register groups each obtained by grouping shift registers of one of the first shift register groups into one or more groups, wherein each of the second shift register groups is further grouped into third shift register groups each having shift registers serially connected, as plural subgroups, and each of the plural data transmitters is connected to shift registers configuring a part of shift registers serially connected in each of the third shift register groups such that all of the plural subgroups in a corresponding second shift register group are parallelly connected.