Block Copolymer Additive for Directed Self-Assembly Alignment
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Solution Overview
Problem
Current directed self-assembly (DSA) methods for block copolymers require tight control of polymer compositions and multiple processing steps, limiting the ease of achieving domain alignment and increasing the complexity of the manufacturing process.
Innovation Solution
A composition comprising a block copolymer and an additive polymer with a reactive functional moiety that forms bonds or complexes with the substrate, allowing for a one-step process that simplifies domain alignment and expands the process window for achieving good DSA results.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a two-step process involving brush coating followed by block copolymer application is used, then domain alignment can be achieved, but the composition control range must be kept tight and process complexity increases
Solution Approach 1:
The patent combines the brush and block copolymer into a single copolymer composition that can be applied in one step. The copolymer contains both the anchoring functionality (formerly in the brush) and the self-assembling block copolymer components, merging two separate application steps into one unified process while maintaining domain alignment capability
Solution Approach 2:
The copolymer composition performs multiple functions simultaneously: it provides substrate anchoring through reactive functional groups, forms phase-separated nanodomains for patterning, and enables directed self-assembly alignment. This multi-functionality eliminates the need for separate brush coating and block copolymer application steps
2Manufacturing precision
If a two-step process with brush and block copolymer is used, then domain alignment is achieved, but the number of processing steps increases
Solution Approach 1:
The patent merges the brush coating step and block copolymer application step into a single copolymer deposition step. This reduces the number of processing steps from two to one, thereby reducing processing time while maintaining the domain alignment function through the copolymer's integrated design
3Manufacturing precision
If tight control of polymer composition is maintained, then good DSA results are achieved, but the ease of manufacture decreases
Solution Approach 1:
The patent changes the compositional parameters of the copolymer to achieve a balance between DSA quality and ease of manufacture. Specifically, the copolymer contains a first block with reactive functional groups for anchoring and a second block for self-assembly, with composition ratios optimized to provide both good alignment and manufacturing flexibility
Solution Approach 2:
The copolymer acts as a composite material combining two distinct polymer blocks with different functions. This composite structure allows the material to simultaneously provide strong substrate anchoring and effective self-assembly, achieving good DSA results while simplifying the manufacturing process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables better domain alignment and simplifies the manufacturing process by reducing the number of coat and bake steps, providing a broader range of polymer molecular weights and weight percentages that can be used, while maintaining high quality of pattern formation.
Implementation Method 1
the additive polymer comprises a reactive functional moiety that forms a bond or a complex or a coordinate with the substrate upon being disposed on the substrate
Implementation Method 2
the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure
Implementation Method 3
the surface tension of the additive polymer with the first polymer and the surface tension of the additive polymer with the second polymer are both lower than the surface tension between the first polymer and second polymer
Data Source
AI summary
Disclosed herein is a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer comprising a polymer wherein the surface tension of the polymer with the first polymer and the surface tension of the polymer with the second polymer are both lower than the surface tension between the first polymer and second polymer; where the additive polymer comprises a reactive functional moiety that forms a bond or a complex or a coordinate with the substrate upon being disposed on the substrate; where the reactive functional moiety is unreacted when it is a part of the composition; and a solvent.