Block Copolymer Undercoat Agent for Defect-Free Phase Separation
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Solution Overview
Problem
Existing block copolymer undercoat agents for forming phase-separated structures in LSI technology face issues with substrate adhesiveness and defects due to excess hydroxy groups that do not contribute to substrate adsorption, leading to unevenness in the underlayer film and defects in the structure body.
Innovation Solution
A block copolymer with a specific chemical structure, represented by General Formula (n1), is developed, where the substrate adsorptive groups are precisely controlled to enhance adhesiveness and reduce non-contributory groups, thereby forming a phase-separated structure with fewer defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a random copolymer of hydroxyethyl acrylate is used as an undercoat agent, then substrate adsorption is achieved through hydroxy groups, but excess hydroxy groups cause unevenness in the underlayer film and defects in the structure body
Solution Approach 1:
The invention changes the chemical structure parameter by replacing the random copolymer of hydroxyethyl acrylate with a block copolymer having a specific structure (Formula 1) where hydroxy groups are positioned at chain ends rather than being randomly distributed. This structural parameter change reduces the total number of hydroxy groups while maintaining substrate adsorption capability, thereby eliminating film unevenness and defects.
Solution Approach 2:
The invention uses a block copolymer composed of two different polymer blocks (A and B) with distinct functions: block A provides substrate adsorption through hydroxy groups, while block B provides phase separation capability. This composite structure allows optimized control of hydroxy group quantity and distribution, resolving the contradiction between adsorption and uniformity.
2Strength
If styrene and random copolymer of hydroxyethyl acrylate are used in the undercoat agent, then high adhesiveness to substrate is achieved, but excess hydroxy groups lead to defects in the structure body
Solution Approach 1:
The invention changes the architectural parameter from random copolymer to block copolymer structure, where hydroxy groups are concentrated at chain ends rather than randomly distributed throughout the polymer chain. This reduces the total number of hydroxy groups to an optimal level that maintains strong substrate adhesion while preventing defect formation during phase separation.
Solution Approach 2:
The invention applies local quality by concentrating substrate adsorptive hydroxy groups specifically at the chain end regions (block A) rather than distributing them throughout the entire polymer structure. This localized placement ensures sufficient substrate adhesion while minimizing excess hydroxy groups that would otherwise cause defects in the phase-separated structure body.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The block copolymer achieves high adhesiveness to the substrate and forms phase-separated structures with reduced defects, improving the uniformity and phase separation performance of the undercoat agent layer.
Implementation Method 1
forming a finer structure body by utilizing a phase-separated structure formed by self-organization of a block copolymer in which blocks incompatible to each other are bonded together
Implementation Method 2
phase-separated structure formed by self-organization of a block copolymer
Implementation Method 3
R1c and R1d each independently represents a substrate adsorptive group-containing group
Data Source
AI summary
A block copolymer represented by General Formula (n1) in which A represents a first polymer block, B represents a second polymer block, R1c and R1d each independently represents a substrate adsorptive group-containing group, R2c and R2d each independently represents a substituent other than the substrate adsorptive group-containing group, m1 and n1 each independently represents an integer of 0 to 5, m2 and n2 each independently represents an integer of 0 to 5, m1+n1≥1, m1+m2≤5, and n1+n2≤5