Substrate Processing Boat Susceptor Support Tips
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Solution Overview
Problem
Batch type substrate processing apparatuses face issues with process films forming on the rear surface of substrates, leading to mechanical stress, bending, and non-uniform film formation, which complicates subsequent processes like photolithography.
Innovation Solution
The apparatus includes a chamber with a boat and susceptor system where substrates are loaded on top of susceptor support tips, and a holder with a vertical rod supports the substrate, preventing process gas from reaching the rear surface by using a grip plate and upper blocking plate to block the process space, ensuring the substrate is seated in a seat groove on the susceptor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrates are mounted on slots in a batch type substrate processing apparatus, then productivity is improved through batch processing, but process films form on the rear surface of substrates causing mechanical stress and bending
Solution Approach 1:
The apparatus divides the substrate support function into separate components: the slot structure for batch loading and the susceptor with seat groove for precise substrate positioning. This segmentation allows the substrate to be supported only at the front surface edge, preventing film formation on the rear surface while maintaining batch processing capability
Solution Approach 2:
The susceptor acts as an intermediary component between the slot and the substrate. It provides a seat groove that receives the substrate front surface, ensuring proper positioning and preventing process gas from reaching the rear surface, thereby eliminating the harmful effect of film formation on the back surface
2Productivity
If substrates are mounted on slots during film formation, then batch processing efficiency is improved, but film uniformity on the rear surface deteriorates
Solution Approach 1:
The substrate support system is segmented into the slot structure for batch handling and the susceptor seat groove for precise positioning. This allows the substrate to be supported only where necessary (front surface edge), preventing process gas contact with the rear surface and ensuring uniform film formation across all substrates in the batch
Solution Approach 2:
The support structure provides localized support only at the front surface edge of each substrate through the seat groove, rather than supporting the entire substrate including the rear surface. This local quality approach ensures that process gas can uniformly deposit film on the front surface without interference from rear surface mounting structures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents film formation on the rear surface of the substrate, improving yield and productivity by minimizing mechanical stress and ensuring uniform film formation on the front surface.
Implementation Method 1
substrates are loaded on top of susceptor support tips
Implementation Method 2
a holder with a vertical rod supports the substrate, preventing process gas from reaching the rear surface by using a grip plate and upper blocking plate to block the process space
Implementation Method 3
ensuring the substrate is seated in a seat groove on the susceptor
Data Source
AI summary
Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber providing a stacking space in which a substrate is stacked and a process space in which a process with respect to the substrate is performed, a boat including at least one boat frame that vertically stands up, the boat being elevated to move into the stacking space and the process space, a plurality of susceptors disposed on the boat frame and spaced apart from each other along a longitudinal direction of the boat frame, wherein, as the boat moves into the process space, the substrate is successively loaded on a top surface of each of the plurality of susceptors, and at least holder including a vertical rod disposed parallel to the boat frame and a substrate support tip protruding from an inner surface of the vertical rod to support the substrate, wherein, when the boat moves into the process space, the vertical rod relatively moves along the longitudinal direction of the boat frame.